Nanostructure and local chemical composition of AlN-Si3N4 layers grown by LPCVD

Thin Solid Films

Volumn 304, Issue 1-2, 1997, Pages 256-266

  Mazel, A ^a   Marti, P ^a   Henry, F ^b   Armas, B ^b   Bonnet, R ^c   Loubradou, M ^c  

^a CEMES CNRS   (France)

^b Centre National de la Recherche Scientifique   (France)

^c UNIV GRENOBLE ALPES   (France)

Author keywords

Aluminium nitride; Electron energy loss spectroscopy; High resolution electron microscopy; Silicon nitride

Indexed keywords

ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; DISLOCATIONS (CRYSTALS); ELECTRON ENERGY LOSS SPECTROSCOPY; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PROTECTIVE COATINGS; SILICON CARBIDE; SILICON NITRIDE; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM NITRIDE; HIGH RESOLUTION ELECTRON MICROSCOPY (HREM); LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD);

CERAMIC COATINGS;

EID: 0031193076     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00221-6     Document Type: Article

References (36)

1. S.M. Gee, J.A. Little, J. Mater. Sci. 26 (1991) 1093.
2. F. Clergue-Ansart, Thèse de doctorat, Ecole Nationale Supérieure de l'Aéronautique et de l'Espace de Toulouse, 1992.
3. S. Goujard, L. Vandenbulcke, H. Tawil, J. Mater. Sci. 29 (1994) 6212.
4. M.E. Westwood, J.D. Webster, R.J. Day, F.H. Hayes, R. Taylor, J. Mater. Sci. 31 (1996) 1389.
5. A. Bellosi, E. Landi, A. Tampieri, J. Mater. Res. 8 (3) (1993) 565.
6. G.H. Schiroky, Adv. Ceram. Mat. 2 (2) (1987) 137.
7. J.I. Federer, Adv. Ceram. Mat. 3 (1) (1987) 137.
8. F. Henry, Thèse de doctorat, Université de Montpellier, 1995.
9. I.A. Aksay, D.M. Dabbs, M. Sarikaya, J. Am. Ceram. Soc. 74 (10) (1991) 2343.
10. R.P. Mulpuri, V.K. Sarin, J. Mater. Res. 11 (6) (1996) 1315.
11. F. Weitzer, K. Remschnig, J.C. Schuster, P. Rogl, J. Mater. Res. 5 (10) (1990) 2152.
12. M. Hillert, S. Jonsson, Calphad 16 (2) (1992) 199.
13. S. Zirinsky, E.A. Irene, J. Electrochem. Soc. 125 (2) (1978) 305.
14. F. Henry, B. Armas, C. Combescure, D. Thenegal, R. Flamand, J. Phys. IV C5 (5) (1995) 785.
15. P. Marti, Thèse de Doctorat, Université Paul Sabatier, Toulouse, 1995.
16. M.A. O'Keefe and R. Kilaas, Scanning Microscopy, (Suppl. 2) (1988) 225.
17. R.F. Egerton, Electron Energy Loss Spectroscopy in the Electron Microscope, Plenum, New York, 1986.
18. K. Hssein, Thèse de Doctorat, Université Paul Sabatier, Toulouse, 1988.
19. S. Abaïdia, Thèse de Doctorat, Université Paul Sabatier, Toulouse, 1994.
20. J.P. Chevalier, Microscopie haute résolution: Amorphes et autres solides désordonnés, in: CNRS (Ed.), Microscopie électronique en science des matériaux, 1983, 269.
21. G.A. Slack, J. Phys. Chem. Solids 34 (1973) 321.
22. V. Serin, G. Zanchi, J. Sévely, Microsc. Microanal. Microstruct. 3 (1992) 201.
23. A.G. McKale, B.W. Veal, A.P. Paulikas, S.K. Chan, G.S. Knapp, J. Am. Ceram. Soc. 110 (1988) 3763.
24. S. Abaidia, V. Serin, G. Zanchi, Y. Kihn, J. Sevely, Philos. Mag. 72 (1995) 1657.
25. R.D. Leapman, Microbeam Analysis, in: K.J.F. Heinrich (Ed.), 1982, 111.
26. A. Bendeddouche, R. Berjoan, E. Bêche, S. Schamm, V. Serin, R. Carles, R. Hillel, J. Phys. IV C5 (5) (1995) 793.
27. T. Aiyama, T. Fukunaga, K. Niihara, T. Hirai, K. Suzuki, J. Non-Cryst. Solids 33 (1979) 131.
28. F.L. Edelman, B.N. Zaitsev, V.Z. Latuta, A.A. Khoromenko, Phys. Status Solidi A 51 (1979) 49.
29. R. Wyckoff, Crystal Structures, Vol. 2, Interscience Publishers, 1964.
30. S. Amelincks, Dislocations in Solid, in: F.N.R. Nabarro (Ed.), 2 (1980) 303.
31. J.P. Hirth and J. Lothe, Theory of Dislocations, McGraw-Hill, 1968.
32. A. Kelly and G.W. Groves, Crystallography and Crystal Defects, Longman, 1970.
33. W. Bollmann, Crystals Defects and Crystallines Interfaces, Springer, Berlin, 1970.
34. A.P. Sutton, V. Vitek, Philos. Trans. R. Soc. London A 309 (1983) 1.
35. R. Bonnet, E. Cousineau, Acta Crystallogr. A 33 (1977) 850.
36. K. Hiraga, K. Tsuno, D. Shindo, M. Hirabayashi, S. Hayashi, T. Hirai, Philos. Mag. A 47 (4) (1983) 483.