Properties of TiAlCN/VCN nanoscale multilayer coatings deposited by mixed high-power impulse magnetron sputtering (HiPIMS) and unbalanced magnetron sputtering - ProcessesImpact of HiPIMS during coating

IEEE Transactions on Plasma Science

Volumn 38, Issue 11 PART 1, 2010, Pages 3062-3070

  Kamath, G ^a   Ehiasarian, A P ^a   Hovsepian, P Eh ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

High power impulse magnetron sputtering (HiPIMS); N2 + Ar + CH4 plasma; nanoscale multilayer; TiAlCN VCN

Indexed keywords

COLUMNAR MICROSTRUCTURES; COMPOSITIONAL ANALYSIS; DENSE STRUCTURES; DEPOSITED COATINGS; DRY SLIDING WEAR; ELEVATED TEMPERATURE; ENHANCED PERFORMANCE; HIGH-POWER; HIGH-POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); IONIZATION STATE; MAGNELI PHASE; MASS GAIN; N2 + AR + CH4 PLASMA; NANOSCALE MULTILAYER COATINGS; NANOSCALE MULTILAYERS; ORDERS OF MAGNITUDE; OXIDIZED SURFACES; PLASMA ANALYSIS; PRODUCTION RATES; SCANNING ELECTRON MICROSCOPE; TIALCN/VCN; TIO; UNBALANCED MAGNETRON SPUTTERING; WEAR COEFFICIENT; X-RAY DIFFRACTION STUDIES;

ETCHING; INORGANIC COATINGS; IONIZATION OF GASES; MAGNETRON SPUTTERING; METAL ANALYSIS; METAL IONS; MULTILAYERS; NANOSTRUCTURED MATERIALS; OXIDATION; PLASMAS; SCANNING ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY DIFFRACTION;

THERMOGRAVIMETRIC ANALYSIS;

EID: 78349311907     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2052473     Document Type: Conference Paper

References (22)

1. P. E. Hovsepian, Q. Luo, G. Robinson, M. Pittman, M. Howarth, and D. Doerwald, "TiAlN/VN superlattice structured PVD coatings: A new alternative in machining of aluminium alloys for aerospace and automotive components, " Surf. Coat. Technol., vol. 201, no. 1/2, pp. 265-272, Sep. 2006.
2. O. Knotek, F. Löffler, and G. Krämer, "Cutting performance of multicomponent and multilayer coatings on cemented carbides and cermets for interrupted cut machining, " Int. J. Refractory Metals Hard Mater., vol. 14, no. 1-3, pp. 195-202, 1996.
3. H. Holleck, "Material selection for hard coatings, " J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 4, no. 6, pp. 2661-2669, Nov. 1986.
4. 0.5N films: Kinetics and mechanisms, " J. Appl. Phys., vol. 67, no. 3, pp. 1542-1553, Feb. 1990.
5. M. Lahres, P. Müller-Humel, and O. Doerfel, "Applicability of different hard coatings in dry milling aluminium alloys, " Surf. Coat. Technol., vol. 91, no. 1/2, pp. 116-121, May 1997.
6. O. Knotek, A. Barimani, B. Bosserhoff, and F. Loffler, "Structure and properties of magnetron-sputtered Ti-V-N coatings, " Thin Solid Films, vol. 193/194, pp. 557-564, 1990.
7. K. Noguchi, N. Kitagawa, H. Ohara, and H. Animoto, "High speed drilling with coated carbide drills, " in Proc. 1st French German Conf. High Speed Machining, 1997, pp. 407-413.
8. C. P. Constable, J. Yarwood, P. E. Hovsepian, L. A. Donohue, D. B. Lewis, and W.-D. Münz, "Structural determination of wear debris generated from sliding wear tests on ceramic coatings using Raman microscopy, " J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 18, no. 4, pp. 1681-1689, Jul. 2000.
9. P. E. Hovsepian and A. P. Ehiasarian, "PVD coated substratecny, " EP 1874981, Jan. 14, 2009.
10. P. E. Hovsepian, A. P. Ehiasarian, A. Deeming, and C. Schimpf, "Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HiPIMS/UBM) technology, " Vacuum, vol. 82, no. 11, pp. 1312-1317, Jun. 2008.
11. P. E. Hovsepian, A. P. Ehiasarian, and I. Petrov, "TiAlCN/VCN nanolayer coatings suitable for machining of Al and Ti alloys deposited by combined high power impulse magnetron sputtering/unbalanced magnetron sputtering, " Surf. Eng., 2009.
12. A. P. Ehiasarian, J. G. Wen, and I. Petrov, "Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion, " J. Appl. Phys., vol. 101, no. 5, p. 054301, Mar. 2007.
13. 4 glow discharge at low pressures, " Plasma Sources Sci. Technol., vol. 8, no. 3, pp. 463-478, Aug. 1999.
14. 4 afterglow plasma for simulation of Titan's atmosphere, " Planet. Space Sci., vol. 57, no. 13, pp. 1621-1630, Nov. 2009.
15. 2 afterglow plasma, " Vacuum, vol. 48, no. 7-9, pp. 671-675, Sep. 1997.
16. J. C. Legrand, A. M. Diamy, R. Hrach, and V. Hrachova, "Mechanisms of methane decomposition in nitrogen afterglow plasma, " Vacuum, vol. 52, no. 1/2, pp. 27-32, Jan. 1999.
17. x films, " Surf. Coat. Technol., vol. 163/164, pp. 267-272, Jan. 2003.
18. Z. Zhou, W. M. Rainforth, D. B. Lewis, S. Creasy, J. J. Forsyth, E. Clegg, A. P. Ehiasarian, P. E. Hovespian, and W.-D. Münz, "Oxidation behaviour of nanoscale TiAlN/VN multilayer coatings, " Surf. Coat. Technol., vol. 177/178, pp. 198-203, Jan. 2004. (Pubitemid 38241964)
19. yN multilayers by combined cathodic-arc/magnetron-sputter deposition, " Thin Solid Films, vol. 302, no. 1/2, pp. 179-192, Jun. 1997.
20. 2 studied with monodispersed particles, " Acta Mater., vol. 52, no. 17, pp. 5143-5150, Oct. 2004.
21. D. B. Lewis, S. J. Creasey, Z. Zhuo, J. J. Forsyth, A. P. Ehiasarian, P. E. Hovsepian, Q. Luo, W. M. Rainforth, and W.-D. Münz, "The effect of (Ti + Al):V ratio on the structure and oxidation behaviour of TiAlN/VN nano-scale multilayer coatings, " Surf. Coat. Technol., vol. 177/178, pp. 252-259, Jan. 2004.
22. P. H. Mayhofer, P. E. Hovsepian, C. Mitterer, and W. D. Münz, "Calorimetric evidence for frictional self-adaptation of TiAlN/VN superlattice coatings, " Surf. Coat. Technol., vol. 177/178, pp. 341-347, Jan. 2004.