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Volumn 6, Issue 2, 2013, Pages 132-142

Mems microgripper actuators and sensors: The state-of-the-art survey

Author keywords

Force feedback; Force sensor; MEMS; Microactuator; Microgripper; Micromanipulation

Indexed keywords

CAPACITIVE SENSORS; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FEEDBACK; GRIPPERS; MICROMANIPULATORS; PNEUMATIC ACTUATORS; PNEUMATICS; SHAPE MEMORY EFFECT;

EID: 84876884503     PISSN: 22127976     EISSN: 1874477X     Source Type: Journal    
DOI: 10.2174/2212797611306020005     Document Type: Article
Times cited : (62)

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