Mems microgripper actuators and sensors: The state-of-the-art survey

Recent Patents on Mechanical Engineering

Volumn 6, Issue 2, 2013, Pages 132-142

  Jia, Yukun ^a   Xu, Qingsong ^a  

^a UNIVERSITY OF MACAU   (Macao)

Author keywords

Force feedback; Force sensor; MEMS; Microactuator; Microgripper; Micromanipulation

Indexed keywords

CAPACITIVE SENSORS; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FEEDBACK; GRIPPERS; MICROMANIPULATORS; PNEUMATIC ACTUATORS; PNEUMATICS; SHAPE MEMORY EFFECT;

ACTUATORS AND SENSORS; ELECTROMAGNETICS; FORCE SENSOR; FORCE-FEEDBACK; MEMS MICROGRIPPERS; MICRO GRIPPER; MICRO MANIPULATION; MICROGRIPPER ACTUATOR; SCIENCE AND ENGINEERING; STATE OF THE ART;

MEMS;

EID: 84876884503     PISSN: 22127976     EISSN: 1874477X     Source Type: Journal    
DOI: 10.2174/2212797611306020005     Document Type: Article

References (85)

1. Beyeler F, Neild A, Oberti S, Bell DJ, Sun Y, Dual J, et al. Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field. J Microelectromech Syst. 2007; 16(1): 7-15.
2. Kim CJ. Silicon electromechanical microgrippers. Ph.D. dissertation, University of California, Berkeley, CA, 1991.
3. Kim CJ, Pisano AP. Silicon-processed overhanging microgripper. J Microelectromechanical Syst 1992; 1(1): 31-6.
4. Chen L, Liu B, Chen T, Shao B. Design of hybrid-type MEMS microgripper. Proceedings of the International Conference on Manufacturing Automation. HongKong, Aug, 2009.
5. Piyabongkarn D, Sun D, Rajamani D, Sezen A, Nelson BJ. Travel range extension of a MEMS electrostatic microactuator. IEEE Trans Control Syst Technol 2005; 13(1): 138-45.
6. Burns DM, Bright VM. Nonlinear flexure for stable deflectionof an electrostatically actuated micromirror. Proceedings of the SPIE: Microelectronics Structures and MEMS for Optical Processing III. Sep, 1997.
7. Seeger JI, Crary SB. Stabilization of electrostatically actuated mechanical devices. Proceedings of the Transducers. Chicago, USA, June, 1997.
8. Seeger JI, Crary SB. Analysis and simulation of MOS capacitor feedback for stabilizing electrostatically actuated mechanical devices. Proceeding of Microsim II on Comput. Mech. Boston, MA, 1998.
9. Seeger JI, Boser BE. Dynamics and control of parallel-plate actuators beyond the electrostatic instability. Proceedings of the Transducers. Sendai, Japan, 1999.
10. Chan EK, Dutton RW. Electrostatic micromechanical actuator with extended range of travel. J Microelectromech Syst. 2000; 9(3): 321-8.
11. Hung ES, Senturia SD. Extending the travel range of analogtuned electrostatic actuators. J Microelectromech Syst 1999; 8(4): 497-505.
12. Chu PB, Pister KSJ. Analysis of closed-loop control of parallelplate electrostatic microgrippers. Proceedings of the IEEE Conference on Robotics Automation, San Diego, CA, 1994.
13. Senturia SD. Microsystem Design. Norwell, Kluwer Academic Publishers: Boston, MA, 2001.
14. Nadal-Guardia R, Dehe A, Aigner R, Castaner LM. Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point. J Microelectromech Syst 2002; 11(3): 255-63.
15. Kalaiarasi AR, Thilagar SH. Design and modeling of electrostatically actuated microgripper. Proceedings of IEEE/ASME International Conference on Mechatronics and Embedded Systems and Applications. 2012.
16. Volland BE, Heerlein H, Rangelow IW. Electrostatically driven microgripper. Microelectron Eng 2002; 61: 1015-23.
17. Chen T, Sun L, Chen L, Rong W, Li X. A hybird-type electrostatically driven Microgripper with an integrated vacuum tool. Sensor Actuator A-Phys 2010; 158: 320-7.
18. Khan F, Bazaz SA, Sohail M. Design, implementation and testing of electrostatic SOI MUMPs based microgripper. Microsystem Technology, 2010; 16: 1957-65.
19. Dabbaj, R.H. Electrostatic device. US2004056742 (2004)
20. Keller, C.G. Electrostatic actuator with a multiplicity of stacked parallel plates. US2004140733 (2004)
21. Lee, K.B. Electrostatic microactuator. US2009322260 (2009)
22. Bordatchev EV, Nikumb SK. Microgripper: Design, finite element analysis and laser microfabrication. Proceedings of the International Conference on MEMS, NANO and Smart Systems. Banff, Alberta, Canada, July, 2003.
23. Bordatchev EV, Nikumb SK, Hsu WS. Fabrication of long-stretch microdrive for MEMS applications by ultra precision laser micromachining. Proceedings of the Canada-Taiwan Workshop on Advanced Manufacturing Technologies. London,Ontario, Canada, 2002.
24. Hsu C, Tai WC, Hsu W. Design and analysis of an electrothermally driven long-stretch micro drive with cascaded structure. Proceedings of ASME International Mechanical Engineering Congress. New Orleans, Louisiana, 2002.
25. Lott CD, McLain TW, Harb JN, Howell LL. Modeling the thermal behaviour of a surface-micromahined linear-displacement thermomechanical microactuator. Sensor Actuator A-Phys 2002; 101: 239-50.
26. Cheng CH, Chan CK, Cheng TC, Hsu CW, Lai GJ. Modeling, fabrication and performance test of an electro-thermal microactuator. Sensor Actuator A-Phys 2008; 143: 360-9.
27. Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. Sensor Actuator A-Phys 2007; 137: 302-7.
28. Huang CS, Cheng YT, Chung J, Hsu W. Investigation of Ni-based thermal bimaterial structure for sensor and actuator application. Sensor Actuator A-Phys 2009; 149: 298-304.
29. Huang S, Zhang X. Gradient residual stress induced elastic deformation of multilayer MEMS structures. Sensor Actuator A-Phys 2007; 134: 177-85.
30. Serrano JR, Phinney LM, Rogers JW. Temperature amplification during laser heating of polycrystalline silicon microcantilevers due to temperature-dependent optical properties. J Heat Mass Transf 2009; 52: 2255-65.
31. nd International Conference on Mechanical and Electronics Engineering. Kyoto, Japan, Aug, 2010.
32. Lorenz H, Laudon M, Renaud P. Mechanical characterization of a new high-aspect-ratio near UV-photoresist. Microelectron Eng 1998; 41-42: 371-4.
33. Lorenz H, Despont M, Fahrnl N, LaBianca N, Renaud P, Vettiger P. SU-8: A low-cost negative resist for MEMS. J Micromech Microeng 1997; 7: 121-4
34. Dellmann L, Roth S, Beuret C, Racine GA, Lorenz H, Despont M, et al. Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications. Proceedings of Int. Conf. SolidState Sens. Actuators. Chicago, IL, June 1997
35. Chronics N, Lee LP. Electrothermally actived SU-8 microgripper for singe cell manipulation in solution. IEEE/ASME J Microelectromech Syst 2005; 14: 857-63.
36. Zhang R, Chu JK, Wang HX, Chen ZP. A multipurpose electrothermal microgripper for biological micromanipulation. Microsyst Technol 2013; 19(1): 89-97.
37. Chu J, Zhang R, Chen Z. A novel SU-8 electrothermal microgripper based on type synthesis of kinematic chain method and stiffness matrix method. J Micromech Microeng 2011; 21(5): 054030.
38. Ivanova K, Ivanov T, Badar A, Volland BE, Rangelow IW, Andrijasevic D, et al. Thermally driven microgripper as a tool for micro assembly. Microelectron Eng, 2006; 83: 1393-5.
39. Henneken VA, Tichem M, Sarro PM. Improved thermal U-beam actuators for micro-assembly. Sensor Actuator A-Phys 2008; 142: 298-305.
40. Kim K, Liu X, Zhang Y, Sun Y. Micronewton force-controlled manipulation of biomaterials using a monolithic MEMS microgripper with two-axis force feedback. Proceedings of IEEE International Conference on Robotics and Automation. Pasadena, CA, May, 2008.
41. Butefisch S, Seidemann V, Buttgenbach S. Novel micro-pneumatic actuator for MEMS. Sensor Actuator A-Phys 2002; 97(8): 638-45.
42. lee MG, Gweon DG, Kim SM. Modelling and optimal design of a fine actuator for optical heads. Mechatronics 1997; 7: 573-88.
43. Kim DH, Lee MG, Kim B, Sun Y. A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: A numerical and experimental study. Smart Mater Struct 2005; 14(6): 1265-72.
44. Lin CM, Fan CH, Lan CC. A shape memory alloy actuated microgripper with wide handling ranges. Proceedings of International Conference on Advanced Intelligent Mechatronics. Singapore, July, 2009
45. Krulevitch P, Lee AP, Ramsey PB, Trevino JC, Hamilton J, Northrup MA. Thin film shape memory alloy microactuators. J Microelectromech Syst 1996; 5(4): 270-82.
46. Zhang H, Bellouard Y, Burdet E, Clavel R, Poo AN, Hutmacher DW. Shape memory alloy microgripper for robotic microassembly of tissue engineering scaffolds. Proceedings of International Conference on Robotics and Automation. New Orleans, LA, May, 2004.
47. Kyung JH, Ko BG, Ha YH, Chung GJ. Design of a microgripper for micromanipulation of microcomponents using SMA wires and flexible hinges. Sensor Actuator A-Phys 2008; 141(1): 144-50.
48. Houston K, Eder C, Sieber A, Menciassi A, Carrozza MC, Dario P. Polymer sensorised microgrippers using SMA actuation. Proceedings of International Conference on Robotics and Automation. Roma, Italy, April, 2007.
49. Moiseeva E, Senousy YM, McNamara S, Harnett CK. Single-mask microfabrication of three-dimensional objects from strained bimorphs. J Micromech Microeng 2007; 17(9): N63.
50. Luo JK, He JH, Fu YQ, Flewitt AJ, Spearing SM, Fleck NA, et al. Fabrication and characterization of diamond-like carbon Ni bimorph normally closed microcages. J Micromech Microeng, 2005; 15(8): 1406-13.
51. Ok J, Chu M, Kim CJCJ. Pneumatically driven microcage for micro-objects in biological liquid. Proceedings of the International Conference on Micro Electro Mechanical Systems. Orlando, FL, 1999.
52. Laflin KE, Morris CJ, Bassik N, Jamal M, Gracias DH. Tetherless microgrippers with transponder tags. J Microelectromech Syst 2011; 20(2): 505-11.
53. Bassika N, Abebec BT, Laflina KE, Gracias DH. Photolithographically patterned smart hydrogel based bilayer actuators. Polymer 2010; 51(26): 6093-8.
54. Jackman RJ, Brittain ST, Adams A, Wu H, Prentiss MG, Whitesides S, et al. Three-dimensional metallic microstructures fabricated by soft lithography and microelectrodeposition. Langmuir 1999; 15(3): 826-36.
55. Leong TG, Benson BR, Call EK, Gracias DH. Thin film stress driven self-folding of microstructured containers. Small 2008; 4(10): 1605-9.
56. Leong TG, Lester PA, Koh TL, Call EK, Gracias DH. Surface tension-driven self-folding polyhedra. Langmuir 2007; 23(17): 8747-51.
57. Randhawa JS, Leong TG, Bassik N, Benson BR, Jochmans MT, Gracias DH. Pick-and-place using chemically actuated microgrippers. J Am Chem Soc 2008; 130 (51): 17238-9.
58. Gultepe E, Randhawa JS, Kadam S, Yamanaka S, Selaru FM, Shin EJ, et al. Biopsy with thermally-responsive untethered microtools. Adv Mater 2013; 25(4): 514-9.
59. Shahinpoor M, Bar-Cohen Y, Simpson JO, Smith J. Ionic polymermetal composites (IPMCs) as biomimetic sensors, actuators, and artificial muscles - a review. Smart Mater Struct 1998; 7(6): R15.
60. Guan J, He H, Hansford DJ, Lee LJ. Self-folding of threedimensional hydrogel microstructures. J Phys Chem B 2005; 109(49): 23134-7.
61. Feinberg AW, Feige A, Shevkoplyas SS, Sheehy S, Whitesides GM, Parker KK. Muscular thin films for building actuators and powering devices. Science 2007; 317 (5843): 1366-70.
62. Miao L, Dong Z, Chan H. Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method. Proceedings of the World Congress on Intelligent Control and Automatioin. Shenyang, China, June, 2004.
63. Rembe C, Kant R, Muller RS. Optical measurement methods to study dynamic behavior in MEMS. Proceedings of the SPIE. Munich, Germany, June, 2001.
64. Nayar SK, NaKagawa Y. Shape from focus. IEEE Trans Pattern Anal Mach Int 1994; 16(8): 824-31.
65. Greitmann G, Buser RA. Tactile microgripper for automated handling of microparts. Sensor Actuator A-Phys 1996; 53(1): 410-5.
66. Molhave K, Hansen O. Electro-thermally actuated microgrippers with integrated force-feedback. J Micromech Microeng 2005; 15(6): 1256-70.
67. Chu Duc T, Lau GK, Creemer JF, Fredrik Creemer J, Sarro PM. Electrothermal microgripper with large jaw displacement and integrated force sensors. J Microelectromech Syst 2008; 17(6): 1546-55.
68. Chu Duc T, Lau GK, Sarro PM. Polymeric thermal microactuator with emebedded silicon skeleton: Part II - Fabrication, characterization, and application for 2-DOF microgripper. J Microelectromech Syst 2008; 17(4): 823-31.
69. Chu Duc T, Creemer JF, Sarro PM. Piezoresistive cantilever beam for force sensing in two dimensions. IEEE Sensor J 2007; 7(1): 96-104.
70. st IEEE Conference on MEMS., Tucson, AZ, 2008.
71. Lau GK, Goosen JFL, Keulen F, Chu Duc T, Sarro PM. Polymeric thermal microactuator with emebedded silicon skeleton: Part I - Design and analysis. J Microelectromech Syst 2008; 17(4): 809-22.
72. Mankame ND, Ananthasuresh GK. Comprehensive thermal modelling and characterization of an electro-thermal-complicant microactuator. J Micromech Microeng 2001; 11(5): 452-62.
73. Huang QA, Lee NKS. Analysis and design of polysilicon thermal flexure actuator. J Micromech Microeng 1999; 9(1): 64-70.
74. Chronis N, Lee LP. Electrothermally actived SU-8 microgripper for single cell manipulation in solution. J Microelectromech Syst 2005; 14(4): 857-63.
75. Park J, Moon W. A hybrid-type micro-gripper with an integrated force sensor. Microsyst Technol 2003; 9(8): 511-19.
76. Zhou Y, Nelson BJ. Adhesion force modeling and measurement for micromanipulation. Proc SPIE Int Symp Intell Syst Adv Manufact 1998; 3519: 169-80.
77. Sun Y, Nelson BJ, Potasek DP, Enikov E. A bulk microfabricated multi-axis capacitive cellular force sensor using transverse com drives. J Micromech Microeng 2002; 12(6): 832-40.
78. Sun Y, Fry SN, Potasek DP, Bell DJ, Nelson BJ. Characterizing fruit fly flight behavior using a microforce sensor with a new comb drive configuration. J Microelectromech Syst 2005; 14: 4-11.
79. Universal capacitive readout IC (MS3110) manual. Irvine Sensors Corporation, 2004.
80. Xin, Z., Guizhang, L., Xiuge, C. Microgripper based on MEMS technology and control system. CN101407060 (2009).
81. Sun, Y., Kim, K. MEMS-based micro and nano grippers with twoaxis force sensors. US2010207411 (2010).
82. Homeijer, B.D., Bicknell, R.N. Calibration of MEMS sensor. WO2013002809 (2013).
83. Arai F, Andou D, Nonoda Y, Fukuda T, Iwata H, Itoigawa K. Integrated microendeffector for micromanipulation. IEEE/ASME Trans Mechatronic 1998; 3(1): 17-23.
84. Voland BE, Heerlein H, Rangelow IW. Electrostatically driven microgripper. Microelectron Eng 2002; 61-62:1015-23.
85. Kim CJ, Pisano AP, Muller RS, Lim MG. Polysilicon Microtweezers. Sensor Actuator A-Phys 1992; 33: 221-7.