Fabrication proces of high aspect ratio elastic structures for piezoelectric motor applications

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 641-644

  Dellmann, L ^a   Roth, S ^a   Beuret, C ^a   Racine, G A ^a   Lorenz, H ^a   Despont, M ^a   Renaud, P ^a   Vettiger, P ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRIC MOTORS; ELECTROPLATING; NICKEL; PHOTORESISTS; ULTRASONIC DEVICES;

PIEZOELECTRIC MOTORS;

PIEZOELECTRIC DEVICES;

EID: 0030717908     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)