Microgripper: Design, finite element analysis and laser microfabrication

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 308-313

  Bordatchev, E V ^a   Nikumb, S K ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Electrothermal effects; Finite element methods; Grippers; Joining processes; Nickel; Optical design; Performance analysis; Prototypes; Quantum cascade lasers; Voltage

Indexed keywords

CASCADE CONTROL SYSTEMS; DESIGN; ELECTRIC POTENTIAL; GRIPPERS; MEMS; MICROANALYSIS; MICROFABRICATION; MICROMETERS; NICKEL; OPTICAL DESIGN; QUANTUM CASCADE LASERS; THICKNESS MEASUREMENT;

ACTUATION PRINCIPLES; ELECTRICAL POTENTIAL; ELECTRO-THERMAL EFFECTS; JOINING PROCESS; LASER MICRO-FABRICATION; OPERATIONAL VOLTAGE; PERFORMANCE ANALYSIS; PROTOTYPES;

FINITE ELEMENT METHOD;

EID: 31644433695     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1222015     Document Type: Conference Paper

References (6)

1. Hsu, T-R., MEMS and Microsystems: Design and Manufacture, McGraw-Hill, New York, 2002.
2. Madou, M.J., Fundamentals of Microfabrication: The Science of Miniaturization, CRC Press, New York, 2002.
3. Braun and K. Zimmer, "Fabrication of MEMS structures by laser machining," Proceedings of the Smart electronics and MEMS International Conference, Vol. 4236, 2001, pp. 213-221.
4. A.S. Holmes, "Laser processes for MEMS manufacture," Proceedings-of-SPIE, Second International Symposium on Laser Precision Microfabrication, Vol. 4426, 2002, pp. 203-209.
5. E.V. Bordatchev, S.K. Nikumb, and W.-S. Hsu, "Fabrication of Long-Stretch Microdrive for MEMS Applications by Ultra Precision Laser Micromachining," Proceedings of the Canada-Taiwan Workshop on Advanced Manufacturing Technologies, September 23-24, 2002, London, Ontario, Canada, pp. 243-251.
6. C. Hsu, W.-C. Tai, and W. Hsu, "Design and Analysis of an Electro-thermally driven Long-stretch Micro Drive with Cascaded Structure," ASME International Mechanical Engineering Congress, Nov. 17-22, 2002, New Orleans, USA, pp. 235-240.