Electrothermal microgripper with large jaw displacement and integrated force sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 519-522

  Chu Duc, T ^a   Lau, G K ^b   Creemer, J F ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC HEATING; ELECTROSTATIC ACTUATORS; GRIPPERS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; REACTIVE ION ETCHING; SENSITIVITY ANALYSIS; SILICON;

CONTACT FORCES; DRIVING VOLTAGES; ELECTRO-THERMAL ACTUATORS; FORCE SENSING; FORCE SENSITIVITY; FORCE SENSORS; INTERNATIONAL CONFERENCES; JAW MOTION; MICRO GRIPPERS; MICRO-ELECTRO MECHANICAL SYSTEMS; PIEZORESISTIVE; POWER CONSUMPTION; WORKING TEMPERATURES;

PHOTORESISTS;

EID: 50149094068     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443707     Document Type: Conference Paper

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