Investigation of Ni-based thermal bimaterial structure for sensor and actuator application

Sensors and Actuators, A: Physical

Volumn 149, Issue 2, 2009, Pages 298-304

  Huang, Chia Sheng ^a   Cheng, Yu Ting ^a   Chung, Junwei ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Bimaterial structure; Bimorph; Electroplating; Nanocomposite

Indexed keywords

ACTUATORS; DIAMONDS; ELECTROCHEMISTRY; ELECTROPLATING; FABRICATION; NANOCOMPOSITES; NATURAL FREQUENCIES; SENSORS;

BIMATERIAL STRUCTURE; BIMORPH; BONDING STRENGTHS; DIAMOND NANOCOMPOSITES; ELECTROPLATING PROCESS; FABRICATED STRUCTURES; INTERLAMINAR; NANOCOMPOSITE; OUTPUT FORCES; PRE DEFORMATIONS; RESONANT FREQUENCIES; SEM; SENSOR AND ACTUATORS; TEMPERATURE CHANGES; THERMAL PERFORMANCE; THERMOMECHANICAL SENSITIVITIES; TIP DEFLECTIONS;

NICKEL;

EID: 58949091405     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.11.019     Document Type: Article

References (25)

1. Chu W.H., Mehregany M., and Mullen R.L. Analysis of tip deflection and force of a bimorph cantilever microactuator. J. Micromech. Microeng. 3 (1993) 4-7
2. Sehr H., Evans A.G.R., Brunnschweiler A., Ensell G.J., and Niblock T.E.G. Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. J. Micromech. Microeng. 11 (2001) 306-310
3. Lim S.H., Choi J., Horowitz R., and Majumdar A. Design and fabrication of a novel bimorph microoptomechanical sensor. J. Microelectromech. Syst. 14 (2005) 683-690
4. Fang W., and Wickert J.A. Comments on measuring thin-film stress using bi-layer micromachined beams. J. Micromech. Microeng. 5 (1995) 276-281
5. Al Aioubi M.Y., Djakov V., Huq S.E., and Prewett P.D. Deflection and load characterisation of bimorph actuators for bioMEMS and other applications. Microelectron. Eng. 73-74 (2004) 898-903
6. Jerman H. Electrically activated normally closed diaphragm valves. J. Micromech. Microeng. 4 (1994) 210-216
7. Hsu C., and Hsu W. A two-way membrane-type micro-actuator with continuous deflections. J. Micromech. Microeng. 10 (2000) 387-394
8. Schweizer S., Calmes S., Laudon M., and Renaud P. Thermally actuated optical microscanner with large angle and low consumption. Sens. Actuators A 76 (1999) 470-477
9. Zhou S., Sun X., and Carr W.N. A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation. J. Micromech. Microeng. 9 (1999) 45-50
10. Riethmuller W., and Benecke W. Thermally excited silicon microactuator. IEEE Trans. Electron Dev. ED-35 (1988) 758-763
11. Spaepen F., and Shull A.L. Mechanical properties of thin films and multilayers. Curr. Opin. Solid State Mater. Sci. 1 (1996) 679-683
12. Hou M.T.K., and Chen R. Effect of width on the stress-induced bending of micromachined bilayer cantilevers. J. Micromech. Microeng. 13 (2003) 141-148
13. Jain A., Qu H., Todd S., and Xie H. A thermal bimorph micromirror with large bi-directional and vertical actuation. Sens. Actuators A 122 (2005) 9-15
14. Baker S.P., Wang X., and Hui C.Y. Effect of nonlinear elastic behavior on bilayer decohesion of thin metal films from nonmetal substrates. J. Appl. Mech. 69 (2002) 407-414
15. Fu Y.Q., Du H.J., and Zhang S. Sputtering deposited TiNi films: relationship among processing, stress evolution and phase transformation behaviors. Surf. Coat. Technol. 167 (2003) 120-128
16. Lin G., Kim C.J., Konishi S., and Fujita H. Design, fabrication, and testing of a C-shape actuator. Transducers '95-Eurosensors IX. Stockholm, Sweden (1995) 416-419
17. Zhang Y., Zhang Y., and Marcus R.B. Thermally actuated microprobes for a new wafer probe card. J. Microelectromech. Syst. 8 (1999) 43-49
18. Teh K.S., Cheng Y.T., and Lin L. MEMS fabrication based on nickel-nanocomposite: film deposition and characterization. J. Micromech. Microeng. 15 (2005) 2205-2215
19. Tsai L.N., Shen G.R., Cheng Y.T., and Hsu W. Performance improvement of an electrothermal microactuator fabricated using Ni-diamond nanocomposite. J. Microelectromech. Syst. 15 (2006) 149-158
20. Fischer-Cripps A.C. Nanoindentation. 1st edn (2002), Springer, New York pp. 27-30
21. Peng W., Xiao Z., and Farmer K.R. Optimization of thermally actuated bimorph cantilevers for maximum deflection. Nanotechnology 1 (2003) 376-379
22. Kessler S.S., Spearing S.M., Atalla M.J., Cesnik C.E.S., and Soutis C. Damage detection in composite materials using frequency response methods. Composites Part B 33 (2002) 87-95
23. Shigley J.E., Mischke C.R., and Budynas R.G. Mechanical Engineering Design. 7th edn (2003), McGraw Hill, New York pp. 313-315
24. Lin C.H., Yeh C.C., Hsu C.P., and Hsu W. Design and fabrication of a cascaded electro-thermal bimorph actuator. Proceedings of the ASME IMECE'05. Orlando, FL, USA (2005)
25. Callister Jr. W.D. Materials Science and Engineering. 4th edn (1996), Wiley, New York p. 601