Piezoresistive cantilever beam for force sensing in two dimensions

IEEE Sensors Journal

Volumn 7, Issue 1, 2007, Pages 96-104

  Duc, T Chu ^b   Creemer, J F ^a,b   Sarro, Pasqualina M ^a,b  

^a IEEE   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Cantilever beam; Force sensor; Piezoresistive sensor; Two dimensional force sensor

Indexed keywords

FORCE SENSOR; PIEZORESISTIVE SENSOR; TWO-DIMENSIONAL FORCE SENSOR;

FORCE MEASUREMENT; MICROMACHINING; SENSITIVITY ANALYSIS; SENSORS; SILICA; SURGERY;

CANTILEVER BEAMS;

EID: 33846290966     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.886992     Document Type: Article

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