Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 4-11

  Sun, Yu ^a   Fry, Steven N ^b   Potasek, D P ^c   Bell, Dominik J ^d   Nelson, Brad J ^d  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF ZURICH   (Switzerland)

^c University of Minnesota   (United States)

^d ETH ZURICH   (Switzerland)

Author keywords

Capacitive sensor; Deep reactive ion etching (DRIE) on silicon on insulator (SOI); Dice free dry release; Differential triplate comb drive; Drosophila melanogaster; Fruit flies; High aspect ratio; Microforce sensing

Indexed keywords

BANDWIDTH; BIOMECHANICS; CAPACITORS; FLIGHT DYNAMICS; FORCE MEASUREMENT; LITHOGRAPHY; MECHANICAL DRIVES; MICROMACHINING; MICROSENSORS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

CAPACITIVE SENSOR; DEEP REACTIVE ION ETCHING (DRIE); DICE FREE DRY RELEASE; DIFFERENTIAL TRIPLATE COMB DRIVE; DROSOPHILA MELANOGASTER; FRUIT FLIES; HIGH ASPECT RATIO; MICROFORCE SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 14044267483     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839028     Document Type: Article

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