Modeling, fabrication and performance test of an electro-thermal microactuator

Sensors and Actuators, A: Physical

Volumn 143, Issue 2, 2008, Pages 360-369

  Cheng, Chin Hsiang ^a   Chan, Chi Kang ^b   Cheng, Tsung Chieh ^c   Hsu, Che Wei ^b   Lai, Guang Jer ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b TATUNG UNIVERSITY   (Taiwan)

^c NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Experiment; Fabrication; Microactuator; Modeling

Indexed keywords

COMPUTER SIMULATION; ELECTRIC EQUIPMENT; FINITE ELEMENT METHOD; ION IMPLANTATION; THERMAL EXPANSION;

ELECTRO-THERMAL MICROACTUATOR; MULTIPHYSICS MODELING PACKAGE; SEMICONDUCTOR MANUFACTURING TECHNOLOGIES; SILICON LAYER;

MICROACTUATORS;

EID: 41349093755     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.11.010     Document Type: Article

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