Travel range extension of a MEMS electrostatic microactuator

IEEE Transactions on Control Systems Technology

Volumn 13, Issue 1, 2005, Pages 138-145

  Piyabongkarn, D ^a   Sun, Y ^b   Rajamani, R ^a   Sezen, A ^a   Nelson, B J ^c  

^a University of Minnesota   (United States)

^b UNIVERSITY OF TORONTO   (Canada)

^c ETH ZURICH   (Switzerland)

Author keywords

Electrostatic actuators; Electrostatic positioning; Nonlinear adaptive controller; Pull in effect; Travel range extension

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; DYNAMICS; ELECTRIC POTENTIAL; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NONLINEAR CONTROL SYSTEMS; PARAMETER ESTIMATION; REACTIVE ION ETCHING; SILICON WAFERS; TRACKING (POSITION);

ACTIVE CONTROL SYSTEMS; DEEP REACTIVE ION ETCHING; ELECTROSTATIC POSITIONING; NONLINEAR ADAPTIVE CONTROLLER; TRAVEL RANGE EXTENSION;

ELECTROSTATIC ACTUATORS;

EID: 12344288468     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2004.838572     Document Type: Article

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