Thin film stress driven self-folding of microstructured containers

Small

Volumn 4, Issue 10, 2008, Pages 1605-1609

  Leong, Timothy G ^a   Benson, Bryan R ^a   Call, Emma K ^b   Gracias, David H ^a  

^a Johns Hopkins University   (United States)

^b Baltimore Polytechnic Institute   (United States)

Author keywords

Lithography; Microcontainers; Self assembly; Thin film stress

Indexed keywords

LITHOGRAPHY; MOLECULAR BEAM EPITAXY; SELF ASSEMBLY; THICK FILMS; THIN FILM DEVICES;

DEVICE PACKAGING; FARADAY CAGES; FILM ORIENTATIONS; LOW PROCESSING TEMPERATURES; MICROCONTAINERS; ON DEMANDS; THIN FILM STRESSES; THIN-FILM STRESS; TRILAYER;

CONTAINERS;

NANOMATERIAL;

ARTICLE; CHEMISTRY; SCANNING ELECTRON MICROSCOPY; ULTRASTRUCTURE;

MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES;

EID: 55349127064     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200800280     Document Type: Article

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