Electrothermal microgripper with large jaw displacement and integrated force sensors

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1546-1555

  Chu Duc, Trinh ^a   Lau, Gih Keong ^b   Creemer, J Fredrik ^c   Sarro, Pasqualina M ^c  

^a VIETNAM NATIONAL UNIVERSITY   (Viet Nam)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electrothermal actuator; Microgripper; Piezoresistive sensor; Polymeric actuator; Sensing microgripper

Indexed keywords

ACTUATORS; ALUMINA; ELECTROSTATIC ACTUATORS; MICROACTUATORS; POLYMERS; SENSORS; SILICON;

ELECTROTHERMAL ACTUATOR; MICROGRIPPER; PIEZORESISTIVE SENSOR; POLYMERIC ACTUATOR; SENSING MICROGRIPPER;

GRIPPERS;

EID: 57449087815     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2007268     Document Type: Article

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