Temperature amplification during laser heating of polycrystalline silicon microcantilevers due to temperature-dependent optical properties

International Journal of Heat and Mass Transfer

Volumn 52, Issue 9-10, 2009, Pages 2255-2264

  Serrano, Justin R ^a   Phinney, Leslie M ^a   Rogers, James W ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b MURRAY STATE UNIVERSITY   (United States)

Author keywords

MEMS; Optical absorption; Polysilicon; Raman thermometry; Thermal model

Indexed keywords

ABSORPTION; AMPLIFICATION; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTROMAGNETIC WAVE ABSORPTION; ENERGY ABSORPTION; HEATING; LASER HEATING; LASER OPTICS; LIGHT ABSORPTION; MEMS; MICROELECTROMECHANICAL DEVICES; MODEL STRUCTURES; OPTICAL PROPERTIES; POLYSILICON; PULSED LASER DEPOSITION; TEMPERATURE CONTROL; TEMPERATURE SENSORS; THERMOGRAPHY (TEMPERATURE MEASUREMENT); THERMOMETERS;

ABSORPTANCE; CONTINUOUS-WAVE LASERS; FINITE DIFFERENCE MODELS; LASER POWER; MICRO-CANTILEVERS; MULTI-LAYERED STRUCTURES; OPTICAL ABSORPTION; OPTICAL ENERGIES; PEAK TEMPERATURES; POLY-CRYSTALLINE SILICONS; RAMAN THERMOMETRY; TEMPERATURE DEPENDENTS; TEMPERATURE PROFILES; THERMAL MODEL; THERMAL RESPONSE; THERMAL TRANSPORTS; TWO-DIMENSIONAL;

LASERS;

EID: 59849083215     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijheatmasstransfer.2008.12.003     Document Type: Article

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