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Volumn 24, Issue 1, 2013, Pages

Pt-Al2O3 dual layer atomic layer deposition coating in high aspect ratio nanopores

Author keywords

[No Author keywords available]

Indexed keywords

AAO MEMBRANE; ALUMINUM OXIDES; ANODIC ALUMINUM OXIDE MEMBRANES; ATOMIC LAYER DEPOSITION COATINGS; CONFORMAL DEPOSITION; DUAL LAYER; ELECTROCHEMICAL SENSING; FIELD EFFECTS; FUEL CELL ELECTRODES; FUNCTIONALIZATIONS; HIGH ASPECT RATIO; METAL INSULATORS; NANOPOROUS MATERIALS; NANOPOROUS MEMBRANE; PORE DIAMETERS; PROCESS PARAMETERS; PT FILMS; SILICON CHIP; THREE-DIMENSIONAL NANOSTRUCTURES; TWO-MATERIALS;

EID: 84870523064     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/1/015602     Document Type: Article
Times cited : (41)

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