Dry transfer bonding of porous silicon membranes to OSTE(+) polymer microfluidic devices

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 232-234

  Saharil, Farizah ^a   Gylfason, Kristinn B ^a   Liu, Yitong ^a   Haraldsson, Tommy ^a   Bettotti, Paolo ^b   Kumar, Neeraj ^b   Van Der Wijngaart, Wouter ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CURING MECHANISM; DEVICE FABRICATIONS; DRY SUBSTRATES; DUAL-CURE; FABRICATION METHOD; LOW TEMPERATURES; POLYMER MICROFLUIDICS; POLYMERIC MICROFLUIDIC DEVICES; SILICON MEMBRANES; THIOL-ENES; TRANSFER BONDING;

FLUIDIC DEVICES; POLYMERS; POROUS SILICON;

MEMS;

EID: 84860477442     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170133     Document Type: Conference Paper

References (9)

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