메뉴 건너뛰기




Volumn 27, Issue 9, 2012, Pages

Monolithic Ge-on-Si lasers for large-scale electronic-photonic integration

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE DEVICES; ANTI-QUENCHING; CMOS COMPATIBLE; COMMUNICATION WAVELENGTHS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DIRECT-GAP SEMICONDUCTOR; ELECTRICAL PUMPING; ELECTRICALLY PUMPED; EMISSION INTENSITY; ENERGY DIFFERENCES; FUTURE GENERATIONS; GAIN SPECTRA; GAP TRANSITION; HISTORICAL REVIEW; INDIRECT BAND GAP; LIGHT EMITTERS; LIGHT EMITTING DEVICES; MATERIAL GROWTH; MONOLITHIC INTEGRATION; MONOLITHIC LASERS; MW OUTPUT; N-TYPE DOPING; ON CHIPS; RESEARCH FIELDS; SI PHOTONICS; SILICON-BASED; THEORETICAL MODELING; UNIQUE FEATURES;

EID: 84865417941     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/27/9/094006     Document Type: Review
Times cited : (127)

References (73)
  • 2
    • 80053288435 scopus 로고    scopus 로고
    • Room temperature direct band-gap emission from an unstrained Ge p-i-n LED on Si
    • 10.4028/www.scientific.net/SSP.178-179.25 1662-9779
    • Arguirov T, Kittler M, Oehme M, Abrosimov N V, Kasper E and Schulze J 2011 Room temperature direct band-gap emission from an unstrained Ge p-i-n LED on Si Solid State Phenom. 178-9 25-30
    • (2011) Solid State Phenom. , vol.178-179 , pp. 25-30
    • Arguirov, T.1    Kittler, M.2    Oehme, M.3    Abrosimov, N.V.4    Kasper, E.5    Schulze, J.6
  • 8
    • 67650538976 scopus 로고    scopus 로고
    • Theory for n-type doped, tensile-strained Ge-SixGeySn1-x-y quantum well lasers
    • 10.1364/OE.17.011246 1094-4087
    • Chang G E, Chang S W and Chuang S L 2009 Theory for n-type doped, tensile-strained Ge-SixGeySn1-x-y quantum well lasers Opt. Express 17 11246-58
    • (2009) Opt. Express , vol.17 , Issue.14 , pp. 11246-11258
    • Chang, G.E.1    Chang, S.W.2    Chuang, S.L.3
  • 9
    • 66849087515 scopus 로고    scopus 로고
    • Room temperature 1.6 m electroluminescence from Ge light emitting diode on Si substrate
    • 10.1364/OE.17.010019 1094-4087
    • Cheng S L, Lu J, Shambat G, Yu H Y, Saraswat K, Vuckovic J and Nishi Y 2009 Room temperature 1.6 m electroluminescence from Ge light emitting diode on Si substrate Opt. Express 17 10019-24
    • (2009) Opt. Express , vol.17 , Issue.12 , pp. 10019-10024
    • Cheng, S.L.1    Lu, J.2    Shambat, G.3    Yu, H.Y.4    Saraswat, K.5    Vuckovic, J.6    Nishi, Y.7
  • 10
    • 79959383063 scopus 로고    scopus 로고
    • Cavity-enhanced direct band electroluminescence near 1550 nm from germanium microdisk resonator diode on silicon
    • 10.1063/1.3592837 0003-6951 211101
    • Cheng S L, Shambat G, Lu J, Yu H Y, Saraswat K, Kamins T I, Vuckovic J and Nishi Y 2011 Cavity-enhanced direct band electroluminescence near 1550 nm from germanium microdisk resonator diode on silicon App. Phys. Lett. 98 211101
    • (2011) App. Phys. Lett. , vol.98 , Issue.21
    • Cheng, S.L.1    Shambat, G.2    Lu, J.3    Yu, H.Y.4    Saraswat, K.5    Kamins, T.I.6    Vuckovic, J.7    Nishi, Y.8
  • 11
    • 77956244835 scopus 로고    scopus 로고
    • Strain-enhanced photoluminescence from Ge direct transition
    • 10.1063/1.3429085 0003-6951 211108
    • Cheng T H, Peng K L and Ko C Y 2010 Strain-enhanced photoluminescence from Ge direct transition Appl. Phys. Lett. 96 211108
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.21
    • Cheng, T.H.1    Peng, K.L.2    Ko, C.Y.3
  • 14
    • 49549126826 scopus 로고
    • Photoluminescence spectra of germanium at high excitation intensities
    • 10.1016/0038-1098(76)91286-2 0038-1098
    • Driel H M V, Elci A, Bessey J S and Scully M O 1976 Photoluminescence spectra of germanium at high excitation intensities Solid State Commun. 20 837-40
    • (1976) Solid State Commun. , vol.20 , Issue.9 , pp. 837-840
    • Driel, H.M.V.1    Elci, A.2    Bessey, J.S.3    Scully, M.O.4
  • 17
    • 75649116816 scopus 로고    scopus 로고
    • Band structure and optical gain of tensile-strained germanium based on a 30 band kp formalism
    • 10.1063/1.3279307 0021-8979 013710
    • El Kurdi M, Fishman G, Sauvage S and Boucaud P 2010a Band structure and optical gain of tensile-strained germanium based on a 30 band kp formalism J. Appl. Phys. 107 013710
    • (2010) J. Appl. Phys. , vol.107 , Issue.1
    • El Kurdi, M.1    Fishman, G.2    Sauvage, S.3    Boucaud, P.4
  • 18
    • 33749380861 scopus 로고    scopus 로고
    • Electrically pumped hybrid AlGaInAs-silicon evanescent laser
    • DOI 10.1364/OE.14.009203
    • Fang A W, Park H, Cohen O, Jones R, Paniccia M J and Bowers J E 2006 Electrically pumped hybrid AlGaInAs-silicon evanescent laser Opt. Express 14 9203-10 (Pubitemid 44507184)
    • (2006) Optics Express , vol.14 , Issue.20 , pp. 9203-9210
    • Fang, A.W.1    Park, H.2    Cohen, O.3    Jones, R.4    Paniccia, M.J.5    Bowers, J.E.6
  • 20
    • 36949002465 scopus 로고    scopus 로고
    • Epitaxy-driven synthesis of elemental Ge/Si strain-engineered materials and device structures via designer molecular chemistry
    • DOI 10.1021/cm071581v
    • Fang Y-Y, Tolle J, Tice J, Chizmeshya A V G, Kouvetakis J, DCosta V R and Menendez J 2007b Epitaxy-driven synthesis of elemental Ge/Si strain-engineered materials and device structures via designer molecular chemistry Chem. Mater. 19 5910-25 (Pubitemid 350241430)
    • (2007) Chemistry of Materials , vol.19 , Issue.24 , pp. 5910-5925
    • Fang, Y.-Y.1    Tolle, J.2    Tice, J.3    Chizmeshya, A.V.G.4    Kouvetakis, J.5    D'Costa, V.R.6    Menendez, J.7
  • 21
    • 0037249861 scopus 로고    scopus 로고
    • Monolithic integration of room-temperature GaAs/AlGaAs lasers on Si substrates via relaxed graded GeSi buffer layers
    • 10.1063/1.1525865 0021-8979
    • Groenert M E, Leitz C W, Pitera A J, Yang V, Lee H, Ram R J and Fitzgerald E A 2003 Monolithic integration of room-temperature GaAs/AlGaAs lasers on Si substrates via relaxed graded GeSi buffer layers J. Appl. Phys. 93 362-7
    • (2003) J. Appl. Phys. , vol.93 , Issue.1 , pp. 362-367
    • Groenert, M.E.1    Leitz, C.W.2    Pitera, A.J.3    Yang, V.4    Lee, H.5    Ram, R.J.6    Fitzgerald, E.A.7
  • 22
    • 0347487952 scopus 로고
    • Infrared absorption in heavily doped n-type germanium
    • 10.1103/PhysRev.125.1965 0031-899X
    • Haas C 1962 Infrared absorption in heavily doped n-type germanium Phys. Rev. 125 1965-71
    • (1962) Phys. Rev. , vol.125 , Issue.6 , pp. 1965-1971
    • Haas, C.1
  • 25
    • 34548392582 scopus 로고
    • The direct radiative transitions in germanium and their use in the analysis of lifetime
    • Haynes J R and Nilsson N G 1964 The direct radiative transitions in germanium and their use in the analysis of lifetime Proc. VIIth Int. Conf. on Physics of Semiconductors (Paris: Dunod) pp 21-31
    • (1964) Proc. VIIth Int. Conf. on Physics of Semiconductors , pp. 21-31
    • Haynes, J.R.1    Nilsson, N.G.2
  • 28
    • 84861666546 scopus 로고    scopus 로고
    • A micromachining-based technology for enhancing germanium light emission via tensile strain
    • 10.1038/nphoton.2012.111 1749-4885
    • Jain J R, Hryciw A, Baer T M, Miller D A B, Brongersma M L and Howe R T 2012 A micromachining-based technology for enhancing germanium light emission via tensile strain Nature Photonics 6 398-405
    • (2012) Nature Photonics , vol.6 , Issue.6 , pp. 398-405
    • Jain, J.R.1    Hryciw, A.2    Baer, T.M.3    Miller, D.A.B.4    Brongersma, M.L.5    Howe, R.T.6
  • 31
    • 0028424982 scopus 로고
    • Optical properties of PECVD erbium-doped silicon-rich silica: Evidence for energy transfer between silicon microclusters and erbium ions
    • 0953-8984 007
    • Kenyon A J, Trwoga P F, Federighi M and Pitt C W 1994 Optical properties of PECVD erbium-doped silicon-rich silica: evidence for energy transfer between silicon microclusters and erbium ions J. Phys.: Condens. Matter 6 L319-24
    • (1994) J. Phys.: Condens. Matter , vol.6 , Issue.21
    • Kenyon, A.J.1    Trwoga, P.F.2    Federighi, M.3    Pitt, C.W.4
  • 32
    • 0018039038 scopus 로고
    • Direct gap recombination in germanium at high excitation level and low temperature
    • Klingenstein W and Schweizer H 1978 Direct gap recombination in germanium at high excitation level and low temperature Solid State Electron. 21 1371-4 (Pubitemid 9449973)
    • (1978) Solid State Electron , vol.21 , Issue.11-12 , pp. 1371-1374
    • Klingenstein Werner1    Schwelzer Heinz2
  • 33
    • 21544447302 scopus 로고
    • Visible electroluminescence from porous silicon
    • 10.1063/1.106652 0003-6951
    • Koshida N and Koyama H 1992 Visible electroluminescence from porous silicon Appl. Phys. Lett. 60 347-9
    • (1992) Appl. Phys. Lett. , vol.60 , Issue.3 , pp. 347-349
    • Koshida, N.1    Koyama, H.2
  • 34
    • 84892276380 scopus 로고
    • A proposed class of heteojunction injection lasers
    • 10.1109/PROC.1963.2706 0018-9219
    • Kroemer H 1963 A proposed class of heteojunction injection lasers Proc. IEEE 51 1782-3
    • (1963) Proc. IEEE , vol.51 , Issue.12 , pp. 1782-1783
    • Kroemer, H.1
  • 36
    • 67449093612 scopus 로고    scopus 로고
    • Ultrafast nonlinear optical response of photoexcited Ge/SiGe quantum wells: Evidence for a femtosecond transient population inversion
    • 10.1103/PhysRevB.79.201306 1098-0121 B
    • Lange C, Köster N S, Chatterjee S, Sigg H, Chrastini D, Isella G, von Känel H, Schäfer M, Kira M and Koch S W 2009 Ultrafast nonlinear optical response of photoexcited Ge/SiGe quantum wells: evidence for a femtosecond transient population inversion Phys. Rev. B 79 201306R
    • (2009) Phys. Rev. , vol.79 , Issue.20
    • Lange, C.1    Köster, N.S.2    Chatterjee, S.3    Sigg, H.4    Chrastini, D.5    Isella, G.6    Von Känel, H.7    Schäfer, M.8    Kira, M.9    Koch, S.W.10
  • 37
    • 19944433396 scopus 로고    scopus 로고
    • Strained Si, SiGe, and Ge channels for high-mobility metal-oxide- semiconductor field-effect transistors
    • DOI 10.1063/1.1819976, 011101
    • Lee M J and Fitzgerald E A 2005 Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors J. Appl. Phys. 97 011101 (Pubitemid 40183093)
    • (2005) Journal of Applied Physics , vol.97 , Issue.1 , pp. 0111011-01110127
    • Lee, M.L.1    Fitzgerald, E.A.2    Bulsara, M.T.3    Currie, M.T.4    Lochtefeld, A.5
  • 38
    • 49149110717 scopus 로고    scopus 로고
    • Enhanced photoluminescence from germanium-based ring resonators
    • 10.1063/1.2950087 0003-6951 041103
    • Lim P H, Kobayashi Y, Takita S, Ishikawa Y and Wada K 2008 Enhanced photoluminescence from germanium-based ring resonators Appl. Phys. Lett. 93 041103
    • (2008) Appl. Phys. Lett. , vol.93 , Issue.4
    • Lim, P.H.1    Kobayashi, Y.2    Takita, S.3    Ishikawa, Y.4    Wada, K.5
  • 39
    • 69949112051 scopus 로고    scopus 로고
    • Enhanced direct bandgap emission in germanium by micromechanical strain engineering
    • 10.1364/OE.17.016358 1094-4087
    • Lim P H, Park S, Ishikawa Y and Wada K 2009 Enhanced direct bandgap emission in germanium by micromechanical strain engineering Opt. Express 17 16358-65
    • (2009) Opt. Express , vol.17 , Issue.18 , pp. 16358-16365
    • Lim, P.H.1    Park, S.2    Ishikawa, Y.3    Wada, K.4
  • 47
    • 67649337317 scopus 로고    scopus 로고
    • Direct-gap optical gain of Ge on Si at room temperature
    • 10.1364/OL.34.001738 0146-9592
    • Liu J F, Sun X, Camacho-Aguilera R, Kimerling L C and Michel J 2009 Direct-gap optical gain of Ge on Si at room temperature Opt. Lett. 34 1738-40
    • (2009) Opt. Lett. , vol.34 , Issue.11 , pp. 1738-1740
    • Liu, J.F.1    Sun, X.2    Camacho-Aguilera, R.3    Kimerling, L.C.4    Michel, J.5
  • 49
    • 34548402181 scopus 로고    scopus 로고
    • Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si
    • DOI 10.1364/OE.15.011272
    • Liu J F, Sun X, Pan D, Wang X X, Kimerling L C, Koch T L and Michel J 2007 Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si Opt. Express 15 11272-7 (Pubitemid 47360563)
    • (2007) Optics Express , vol.15 , Issue.18 , pp. 11272-11277
    • Liu, J.1    Sun, X.2    Pan, D.3    Wang, X.4    Kimerling, L.C.5    Koch, T.L.6    Michel, J.7
  • 51
    • 34548429075 scopus 로고
    • Electroreflectance of heavily doped n-type and p-type germanium near the direct gap
    • 10.1103/PhysRevB.6.521 0556-2805 B
    • Lukeš F and Humliček J 1972 Electroreflectance of heavily doped n-type and p-type germanium near the direct gap Phys. Rev. B 6 521-33
    • (1972) Phys. Rev. , vol.6 , Issue.2 , pp. 521-533
    • Lukeš, F.1    Humliček, J.2
  • 54
    • 84887074345 scopus 로고    scopus 로고
    • Germanium as the unifying material for silicon photonics
    • Michel J and Romagnoli M 2012 Germanium as the unifying material for silicon photonics SPIE Newsroom (28 June 2012)
    • (2012) SPIE Newsroom
    • Michel, J.1    Romagnoli, M.2
  • 55
    • 6244273562 scopus 로고
    • Effect of impurities on free-hole infrared absorption in p-type germanium
    • 10.1103/PhysRev.105.885 0031-899X
    • Newman R. and Tyler W W 1957 Effect of impurities on free-hole infrared absorption in p-type germanium Phys. Rev. 105 885-6
    • (1957) Phys. Rev. , vol.105 , Issue.3 , pp. 885-886
    • Newman, R.1    Tyler, W.W.2
  • 59
    • 80052182984 scopus 로고    scopus 로고
    • Phosphorus atomic layer doping of germanium by the stacking of multiple δ layers
    • 10.1088/0957-4484/22/37/375203 0957-4484 375203
    • Scappucci1 G, Capellini G, Klesse W M and Simmons M Y 2011 Phosphorus atomic layer doping of germanium by the stacking of multiple δ layers Nanotechnology 22 375203
    • (2011) Nanotechnology , vol.22 , Issue.37
    • Scappucci, G.1    Capellini, G.2    Klesse, W.M.3    Simmons, M.Y.4
  • 60
    • 78650332028 scopus 로고    scopus 로고
    • Direct band Ge photoluminescence near 1.6 m coupled to Ge-on-Si microdisk resonators
    • 10.1063/1.3526732 0003-6951 241102
    • Shambat G, Cheng S L, Lu J, Nishi Y and Vuckovic J 2010 Direct band Ge photoluminescence near 1.6 m coupled to Ge-on-Si microdisk resonators Appl. Phys. Lett. 97 241102
    • (2010) Appl. Phys. Lett. , vol.97 , Issue.24
    • Shambat, G.1    Cheng, S.L.2    Lu, J.3    Nishi, Y.4    Vuckovic, J.5
  • 61
    • 0009889927 scopus 로고
    • Direct gap Ge/GeSn/Si and GeSn/Ge/Si heterostructures
    • 10.1006/spmi.1993.1122 0749-6036
    • Soref R A and Friedman L 1993b Direct gap Ge/GeSn/Si and GeSn/Ge/Si heterostructures Superlattices Microstruct. 14 189-93
    • (1993) Superlattices Microstruct. , vol.14 , Issue.2-3 , pp. 189-193
    • Soref, R.A.1    Friedman, L.2
  • 62
    • 0027887558 scopus 로고
    • Silicon-based optoelectronics
    • 10.1109/5.248958 0018-9219
    • Soref R A 1993a Silicon-based optoelectronics Proc. IEEE 81 1687-706
    • (1993) Proc. IEEE , vol.81 , Issue.12 , pp. 1687-1706
    • Soref, R.A.1
  • 63
    • 0040734474 scopus 로고
    • Properties of heavily doped n-type germanium
    • 10.1063/1.1728243 0021-8979
    • Spitzer W G, Trumbore F A and Logan R A 1961 Properties of heavily doped n-type germanium J. Appl. Phys. 32 1822-30
    • (1961) J. Appl. Phys. , vol.32 , Issue.10 , pp. 1822-1830
    • Spitzer, W.G.1    Trumbore, F.A.2    Logan, R.A.3
  • 64
    • 63449138705 scopus 로고    scopus 로고
    • Optical bleaching of thin film Ge on Si
    • 10.1149/1.2986848
    • Sun X, Liu J F, Kimerling L C and Michel J 2008 Optical bleaching of thin film Ge on Si ECS Trans. 16 881-9
    • (2008) ECS Trans. , vol.16 , pp. 881-889
    • Sun, X.1    Liu, J.F.2    Kimerling, L.C.3    Michel, J.4
  • 65
    • 66349116228 scopus 로고    scopus 로고
    • Room-temperature direct bandgap electroluminescence from Ge-on-Si light-emitting diodes
    • 10.1364/OL.34.001198 0146-9592
    • Sun X, Liu J F, Kimerling L C and Michel J 2009a Room-temperature direct bandgap electroluminescence from Ge-on-Si light-emitting diodes Opt. Lett. 34 1198-200
    • (2009) Opt. Lett. , vol.34 , Issue.8 , pp. 1198-1200
    • Sun, X.1    Liu, J.F.2    Kimerling, L.C.3    Michel, J.4
  • 66
    • 67650486631 scopus 로고    scopus 로고
    • Direct gap photoluminescence of n-type tensile-strained Ge-on-Si
    • 10.1063/1.3170870 0003-6951 011911
    • Sun X, Liu J F, Kimerling L C and Michel J 2009b Direct gap photoluminescence of n-type tensile-strained Ge-on-Si Appl. Phys. Lett. 95 011911
    • (2009) Appl. Phys. Lett. , vol.95 , Issue.1
    • Sun, X.1    Liu, J.F.2    Kimerling, L.C.3    Michel, J.4
  • 69
    • 33750668607 scopus 로고
    • Band lineups and deformation potentials in model-solid theory
    • 10.1103/PhysRevB.39.1871 0163-1829 B
    • Van de Walle C G 1989 Band lineups and deformation potentials in model-solid theory Phys. Rev. B 39 1871-83
    • (1989) Phys. Rev. , vol.39 , Issue.3 , pp. 1871-1883
    • Van De Walle, C.G.1
  • 70
    • 0020828481 scopus 로고
    • Photoluminescence in heavily doped Si and Ge
    • 10.1051/jphyscol:1983508 0449-1947
    • Wagner J, Compaan A and Axmann A 1983 Photoluminescence in heavily doped Si and Ge J. Phys. Colloques 44 C5-61-C5-64
    • (1983) J. Phys. Colloques , vol.44 , Issue.C5
    • Wagner, J.1    Compaan, A.2    Axmann, A.3
  • 72
    • 34047271801 scopus 로고
    • Radiative recombination in heavily doped p-type germanium
    • 10.1103/PhysRevB.30.7030 0163-1829 B
    • Wagner J and Via L 1984b Radiative recombination in heavily doped p-type germanium Phys. Rev.. B 30 7030-6
    • (1984) Phys. Rev. . , vol.30 , Issue.12 , pp. 7030-7036
    • Wagner, J.1    Via, L.2
  • 73
    • 0028423199 scopus 로고
    • Room-temperature sharp line electroluminescence at λ = 1.54 m from an erbium-doped, silicon light-emitting diode
    • 10.1063/1.111977 0003-6951
    • Zheng B, Michel J, Ren F Y G, Kimerling L C, Jacobson D C and Poate J M 1994 Room-temperature sharp line electroluminescence at λ = 1.54 m from an erbium-doped, silicon light-emitting diode Appl. Phys. Lett. 64 2842-44
    • (1994) Appl. Phys. Lett. , vol.64 , Issue.21 , pp. 2842-2844
    • Zheng, B.1    Michel, J.2    Ren, F.Y.G.3    Kimerling, L.C.4    Jacobson, D.C.5    Poate, J.M.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.