Development and application of multiple-probe scanning probe microscopes

Advanced Materials

Volumn 24, Issue 13, 2012, Pages 1675-1692

  Nakayama, Tomonobu ^a,c   Kubo, Osamu ^a   Shingaya, Yoshitaka ^a   Higuchi, Seiji ^b,c   Hasegawa, Tsuyoshi ^a   Jiang, Chun Sheng ^d   Okuda, Taichi ^e   Kuwahara, Yuji ^f   Takami, Kazuhiro ^g   Aono, Masakazu ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b HORIBA LTD   (Japan)

^c UNIVERSITY OF TSUKUBA   (Japan)

^d NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^e HIROSHIMA UNIVERSITY   (Japan)

^f OSAKA UNIVERSITY   (Japan)

^g KOBELCO RESEARCH INSTITUTE INC   (Japan)

Author keywords

carbon nanotubes; graphene; multiple probe atomic force microscope; multiple probe scanning tunneling microscope; nanoscale electrical conductivity

Indexed keywords

ADVANCED MATERIALS; AFM; AFM IMAGE; ATOMIC FORCE MICROSCOPE (AFM); ELECTRICAL CONDUCTIVITY; ELECTRICAL CONDUCTIVITY MEASUREMENTS; ELECTRICAL CONTACTS; FORCE SENSING; FOUR-PROBE; HIGH RESOLUTION; INSULATING SUBSTRATES; METAL NANOWIRE; MOLECULAR FILMS; MULTIPLE-PROBE ATOMIC FORCE MICROSCOPE; MULTIPLE-PROBE SCANNING TUNNELING MICROSCOPE; NANO SCALE; NANOSCIENCE AND NANOTECHNOLOGIES; SCANNING PROBE MICROSCOPE; SCANNING TUNNELING MICROSCOPES;

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; DESIGN; DYNAMIC POSITIONING; ELECTRIC CONDUCTIVITY; GRAPHENE; NANOSCIENCE; NANOSTRUCTURED MATERIALS; NANOWIRES; TWO DIMENSIONAL;

MICROSCOPES;

CARBON NANOTUBE; METAL; NANOMATERIAL; NANOWIRE;

ARTICLE; CHEMISTRY; COMPUTER PROGRAM; ELECTRIC CONDUCTIVITY; EQUIPMENT DESIGN; INSTRUMENTATION; SCANNING PROBE MICROSCOPY; ULTRASTRUCTURE;

ELECTRIC CONDUCTIVITY; EQUIPMENT DESIGN; METALS; MICROSCOPY, SCANNING PROBE; NANOSTRUCTURES; NANOTUBES, CARBON; NANOWIRES; SOFTWARE;

EID: 84859152227     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201200257     Document Type: Article

References (89)

1. G. Binnig, H. Rohrer, Helvetica Phys. Acta 1982, 55, 726.
2. G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel, Phys. Rev. Lett. 1982, 49, 57.
3. G. Binnig, C. F. Quate, Ch. Gerber, Phys Rev Lett. 1986, 56, 930.
4. For example, E. Meyer, H. J. Hug, R. Bennewitz, in Scanning Probe Microscopy: The Lab on a Tip, Springer-Verlag, Germany 2004.
5. D. M. Eigler, E. K. Schweizer, Nature 1990, 344, 524.
6. a) K. Ariga, T. Mori, J. P. Hill, Adv. Mater. 2012, 24, 158
7. b) D. Golberg, P. M. F. J. Costa, M.-S. Wang, X. Wei, D.-M. Tang, Z. Xu, Y. Huang, U. K. Gautam, B. Liu, H. Zeng, N. Kawamoto, C. Zhi, M. Mitome, Y. Bando, Adv. Mater. 2012, 24, 177
8. c) M. Osada, T. Sasaki, Adv. Mater. 2012, 24, 210.
9. a) E. Fabbri, L. Bi, D. Pergolesi, E. Traversa, Adv. Mater. 2012, 24, 195
10. H. Tong, S. Ouyang, Y. Bi, N. Umezawa, M. Oshikiri, J. Ye, Adv. Mater. 2012, 24, 229.
11. a) S. Wu, T. Tsuruoka, K. Terabe, T. Hasegawa, J. P. Hill, K. Ariga, M. Aono, Adv. Funct. Mater. 2011, 21, 93
12. b) T. Hasegawa, K. Terabe, T. Tsuruoka, M. Aono, Adv. Mater. 2012, 24, 252.
13. M. Sakurai, C. Thirstrup, T. Nakayama, M. Aono, Surf. Sci. 1997, 386, 154.
14. M. Aono, C.-S. Jiang, T. Nakayama, T. Okuda, S. Qiao, M. Sakurai, C. Thirstrup, Z.-H. Wu, Oyo Buturi (Applied Physics- Monthly journal of the Japan Society of Applied Physics) 1998, 67, 1361 (Japanese). English abstract () and Japanese full text () are also available.
15. O. Kubo, Y. Shingaya, M. Nakaya, M. Aono, T. Nakayama, Appl. Phys. Lett. 2006, 88, 254101.
16. H. Watanabe, C. Manabe, T. Shigematsu, M. Shimizu, Appl. Phys.Lett. 2001, 78, 2928.
17. H. Grube, B. C. Harrison, J. Jia, J. J. Boland, Rev. Sci. Instrum. 2001, 72, 4388.
18. H. Okamoto, D. Chen, Rev. Sci. Instrum. 2001, 72, 4398.
19. P. Jaschinsky, P. Coenen, G. Pirug, B. Voigtländer, Rev. Sci. Instrum. 2006, 77, 093701.
20. A. Matsui, Y. Shigeta, Rev. Sci. Instrum. 2007, 78, 106107.
21. K. Takami, J. Mizuno, M. Akai-kasaya, A. Saito, M. Aono, Y. Kuwahara, J. Phys. Chem. B 2004, 108, 16353.
22. K. Takami, M. Akai-kasaya, A. Saito, M. Aono, Y. Kuwahara, Jpn. J. Appl. Phys. 2005, 44, L120.
23. H. Dai, J. H. Hafner, A. G. Rinzler, D. T. Colbert, R. E. Smalley, Nature 1996, 384, 147.
24. H. Nishijima, S. Kamo, S. Akita, Y. Nakayama, K. I. Hohmura, S. H. Yoshimura, K. Takeyasu, Appl. Phys. Lett. 1999, 74, 4061.
25. J. H. Hafner, C. L. Cheung, C. M. Lieber, Nature 1999, 398, 761.
26. V. Barwich, M. Bammerlin, A. Baratoff, R. Bennewitz, M. Guggisberg, C. Loppacher, O. Pfeiffer, E. Meyer, H.-J. Güntherodt, J.-P. Salvetat, J.-M. Bonard, L. Forrõ, Appl. Surf. Sci. 2000, 157, 269.
27. T. Shimizu, H. Tokumoto, S. Akita, Y. Nakayama, Surf. Sci. 2001, 486, L455.
28. T. Ikuno, M. Katayama, M. Kishida, K. Kamada, Y. Murata, T. Yasuda, S. Honda, J.-G. Lee, H. Mori, K. Oura, Jpn. J. Appl. Phys. 2004, 43, L644.
29. S. Yoshimoto, Y. Murata, K. Kubo, K. Tomita, K. Motoyoshi, T. Kimura, H. Okino, R. Hobara, I. Matsuda, S. Honda, M. Katayama, S. Hasegawa, Nano Lett. 2007, 7, 956.
30. Y. Shingaya, T. Nakayama, M. Aono, Sci. Technol. Adv. Mat. 2004, 5, 647.
31. J. D. Wasscher, Philips Res. Rep. 1961, 16, 301.
32. J. Onoe, T. Nakayama, M. Aono, T. Hara, Appl. Phys. Lett. 2003, 82, 595.
33. I. Shiraki, F. Tanabe, R. Hobara, T. Nagao, S. Hasegawa, Surf. Sci. 2001, 493, 633.
34. M. Ishikawa, M. Yoshimura, K. Ueda, Jpn. J. Appl. Phys. 2005, 44, 1502.
35. X. Lin, X. B. He, T. Z. Yang, W. Guo, D. X. Shi, H.-J. Gao, D. D. D. Ma, S. T. Lee, F. Liu, X. C. Xie, Appl. Phys. Lett. 2006, 89, 043103.
36. A. S. Walton, C. S. Allen, K. Critchley, M. Ś. Gòrzny, J. E. McKendry, R. M. D. Brydson, B. J. Hickey, S. D. Evans, Nanotechnology 2007, 18, 065204.
37. M. Aono, T. Nakayama, Y. Kuwahara, M. Akai, Oyo Buturi (Applied Physics- Monthly journal of the Japan Society of Applied Physics) 2006, 75, 285 (Japanese). English abstract () is also available. (Japanese full text on the site is available only for the members of Jpn. Soc. of Appl. Phys.).
38. M. Tortonese, R. C. Barrett, C. F. Quate, Appl. Phys. Lett. 1993, 62, 834.
39. R. Hobara, N. Nagamura, S. Hasegawa, I. Matsuda, Y. Yamamoto, Y. Miyatake, T. Nagamura, Rev. Sci. Instrum. 2007, 78, 053705.
40. O. Guise, H. Marbach, J. T. Yates Jr., M. C. Jung, J. Levy, J. Ahner, Rev. Sci. Instrum. 2005, 76, 045107.
41. A. Bannani, C. A. Bobisch, R. Möller, Rev. Sci. Instrum. 2008, 79, 083704.
42. G. Meyer, N. M. Amer, Appl. Phys. Lett. 1988, 53, 1045.
43. E. Tsunemi, N. Satoh, Y. Miyato, K. Kobayashi, K. Matsushige, H. Yamada, Jpn. J. Appl. Phys. 2007, 46, 5636.
44. E. Tsunemi, K. Kobayashi, K. Matsushige, H. Yamada, Rev. Sci. Instrum. 2011, 82, 033708.
45. K. Karrai, R. D. Grober, Appl. Phys. Lett. 1995, 66, 1842.
46. T. Akiyama, U. Staufer, N. F. de Rooij, P. Frederix, A. Engel, Rev. Sci. Instrum. 2003, 74, 112.
47. N. Satoh, E. Tsunemi, Y. Miyato, K. Kobayashi, S. Watanabe, T. Fujii, K. Matsushige, H. Yamada, Jpn. J. Appl. Phys. 2007, 46, 5543.
48. F. Iwata, Y. Mizuguchi, K. Ozawa, T. Ushiki, Jpn. J. Appl. Phys. 2010, 49, 08LB14.
49. F. J. Giessibl, Appl. Phys. Lett. 1998, 73, 3956.
50. T. R. Albrecht, P. Grütter, D. Horne, D. Rugar, J. Appl. Phys. 1991, 69, 668.
51. S. Higuchi, H. Kuramochi, O. Kubo, S. Masuda, Y. Shingaya, M. Aono, T. Nakayama, Rev. Sci. Instrum. 2011, 82, 043701.
52. S. Higuchi, H. Kuramochi, O. Laurent, T. Komatsubara, S. Machida, M. Aono, K. Obori, T. Nakayama, Rev. Sci. Instrum. 2010, 81, 073706.
53. S. Higuchi, O. Kubo, H. Kuramochi, M. Aono, T. Nakayama, Nanotechnology 2011, 22, 285205.
54. O. Kubo, H. Kuramochi, S. Higuchi, Y. Shingaya, S. Masuda, M. Aono, T. Nakayama, unpublished.
55. J. C. Russ, in The Image Processing Handbook, 3rd ed., CRC Press, USA 1999, page 365-370.
56. ITRS 2009 Edition, Interconnect chapter, ().
57. J. Y. Duboz, P. A. Badoz, F. Arnaud d'Avitaya, J. A. Chroboczek, Appl. Phys. Lett. 1989, 55, 84.
58. Y. Chen, D. A. A. Ohlberg, G. Medeiros-Ribeiro, Y. A. Chang, R. S. Williams, Appl. Phys. A 2002, 75, 353.
59. O. Kubo, Y. Shingaya, M. Aono, T. Nakayama, Appl. Phys. Lett. 2006, 88, 233117.
60. T. Uchihashi, U. Ramsperger, Appl. Phys. Lett. 2002, 80, 4169.
61. K. Fuchs, Proc. Cambridge Philos. Soc. 1938, 34, 100.
62. E. H. Sondheimer, Adv. Phys. 1952, 1, 1.
63. D. K. Lim, O. Kubo, Y. Shingaya, T. Nakayama, Y. H. Kim, J. Y. Lee, M. Aono, H. Lee, D. Lee, S. Kim, Appl. Phys. Lett. 2008, 92, 203114.
64. D. K. Lim, D. Lee, H. Lee, S.-S. Bae, J. Choi, S. Kim, C. Ji, R. Ragan, D. A. A. Ohlberg, Y. A. Chang, R. S. Williams, Nanotechnology 2007, 18, 095706.
65. H. Itoh, S. Narui, A. Sayama, T. Ichinokawa, Phys. Rev. B 1992, 45, 11136.
66. G. Ottaviani, K. N. Tu, J. W. Mayer, Phys. Rev. B 1981, 24, 3354.
67. S. Iijima, Nature 1991, 354, 56.
68. For example, S. J. Tans, M. H. Devoret, H. Dai, A. Thess, R. E. Smalley, L. J. Geerligs, C. Dekker, Nature 1997, 386, 474.
69. Q. Chen, S. Wang, L.-M. Peng, Nanotechnology 2006, 17, 1087.
70. D. Mann, A. Javey, J. Kong, Q. Wang, H. Dai, Nano Lett. 2003, 3, 1541.
71. B. Gao, Y. F. Chen, M. S. Fuhrer, D. C. Glattli, A. Bachtold, Phys. Rev. Lett. 2005, 95, 196802.
72. H. Ishii, N. Kobayashi, K. Hirose, Phys. Rev. B 2010, 82, 085435.
73. H. Ishii, N. Kobayashi, K. Hirose, Appl. Phys. Express 2008, 1, 123002.
74. A. Javey, J. Guo, M. Paulsson, Q. Wang, D. Mann, M. Lundstrom, H. Dai, Phys. Rev. Lett. 2004, 92, 106804.
75. J.-Y. Park, S. Rosenblatt, Y. Yaish, V. Sazonova, H. Üstünel, S. Braig, T. A. Arias, P. W. Brouwer, P. L. McEuen, Nano Lett. 2004, 4, 517.
76. M. S. Purewal, B. H. Hong, A. Ravi, B. Chandra, J. Hone, P. Kim, Phys. Rev. Lett. 2007, 98, 186808.
77. S. Datta, in Electronic Transport in Mesoscopic Systems, Cambridge University Press, UK 1997, Ch. 2.
78. C. Joachim, J. K. Gimzewski, A. Aviram, Nature 2000, 408, 541.
79. R. Waser, M. Aono, Nature Mater. 2007, 6, 833.
80. K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V. Grigorieva, A. A. Firsov, Science 2004, 306, 666.
81. A. C. Ferrari, J. C. Meyer, V. Scardaci, C. Casiraghi, M. Lazzeri, F. Mauri, S. Piscanec, D. Jiang, K. S. Novoselov, S. Roth, A. K. Geim, Phys. Rev. Lett. 2006, 97, 187401.
82. Z. Ni, Y. Wang, T. Yu, Z. Shen, Nano Res. 2008, 1, 273.
83. L. J. van der Pauw, Philips Res. Rep. 1958, 13, 1.
84. Y.-W. Tan, Y. Zhang, H. L. Stormer, P. Kim, Eur. Phys. J. Special Topics 2007, 148, 15.
85. X. Du, I. Skachko, A. Barker, E. Y. Andrei, Nat. Nanotechnology 2008, 3, 491.
86. K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, M. I. Katsnelson, I. V. Grigorieva, S. V. Dubonos, A. A. Firsov, Nature 2005, 438, 197.
87. J.-H. Chen, C. Jang, S. Adam, M. S. Fuhrer, E. D. Williams, M. Ishigami, Nat. Phys. 2008, 4, 377.
88. E. Tsunemi, K. Kobayashi, K. Matsushige, H. Yamada, J. Vac. Sci. Technol. B 2010, 28, C4D24.
89. A. Kaneta, T. Hashimoto, K. Nishimura, M. Funato, Y. Kawakami, Appl. Phys. Express 2010, 3, 102102.