Metal oxide morphology in argon-assisted glancing angle deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 2, 2012, Pages

  Sorge, J B ^a   Taschuk, M T ^a   Wakefield, N G ^a   Sit, J C ^a   Brett, M J ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON FLUX; BEAM GEOMETRY; BIREFRINGENT THIN FILMS; COLUMNAR ARCHITECTURES; DEPOSITION PROCESS; FILM DENSITY; FILM MATERIALS; GLANCING ANGLE DEPOSITION; METAL OXIDES; NANOSCALE FILMS; THIN-FILM DEPOSITION TECHNIQUE; TILT ANGLE; VAPOR FLUXES;

METALLIC COMPOUNDS; PHOTONIC CRYSTALS; SPECIFIC SURFACE AREA; VAPORS;

MORPHOLOGY;

EID: 84858062821     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3687204     Document Type: Article

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