Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

IEEE Sensors Journal

Volumn 8, Issue 9, 2008, Pages 1521-1522

  Brett, Michael J ^a,b   Sorge, Jason B ^a   Steele, John J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition (GLAD); humidity; ion beam applications; measurement; thin films

Indexed keywords

EID: 85008064619     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2008.924385     Document Type: Article

References (11)

1. K. D. Harris, A. Huizinga, and M. J. Brett, “High-speed porous thin film humidity sensors,” Electrochem. Solid-State Lett., vol. 5, no. 11, pp. H27-H29, 2002.
2. J. J. Steele, G. A. Fitzpatrick, and M. J. Brett, “Capacitive humidity sensors with high sensitivity and subsecond response times,” IEEE Sensors J., vol. 7, no. 6, pp. 955–956, Jun. 2007.
3. J. J. Steele and M. J. Brett, “Nanostructure engineering in porous columnar thin films: Recent advances,” J. Mater. Sci.—Mater. Electron., vol. 18, no. 4, pp. 367–379, Apr. 2007.
4. I. Hodgkinson and Q. H. Wu, “Ion-beam control of thin-film microstructural columnar angle,” Mod. Phys. Lett., vol. 15, pp. 1328–1331, 2001.
5. M. Fleischauer, J. B. Sorge, R. A. Joseph, and M. J. Brett, “Enhanced control of porous thin film morphology via ion bombardmant,” in MRS Proc., 2007, vol. 960-N01-03.
6. J. Sorge, M. Summers, M. Fleischauer, K. Tabunshchyk, A. Kovalenko, and M. J. Brett, “Ion beam assisted square spiral photonic crystal fabrication,” in MRS Proc., 2007, vol. 1014-AA07-26.
7. L. Greenspan, “Humidity fixed points of binary saturated aqueous solutions,” J. Res. Nat. Bur. Stand. A, vol. 81, no. 1, pp. 89–96, Jan.-Feb. 1977.
8. P. Van Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M. Op De Beeck, K. Baert, J. Suls, W. Sansen, P. Jacobs, L. Hermans, and R. Mertens, “Nanoscaled interdigitated electrode arrays for biochemical sensors,” Sens. Actuators B, pp. 73–80, 1998.
9. R. Igreja and C. J. Dias, “Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structure,” Sens. Actuators A, vol. 112, pp. 291-301,2004.
10. R. N. Tait, T. Smy, and M. J. Brett, “Modelling and characterization of columnar growth in evaporated films,” Thin Solid Films, vol. 226, pp. 196–201, 1993.
11. J. J. Steele, J. Gospodyn, J. C. Sit, and M. J. Brett, “Impact of morphology on high-speed humidity sensor performance,” IEEE Sensors J., vol. 6, no. 1, pp. 24–27, Feb. 2006.