Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition

Journal of Materials Research

Volumn 23, Issue 9, 2008, Pages 2500-2505

  Zhong, Y ^a   Shin, Y C ^a   Kim, C M ^a   Lee, B G ^a   Kim, E H ^a   Park, Y J ^b   Sobahan, K M A ^b   Hwangbo, C K ^b   Lee, Y P ^c   Kim, T G ^a  

^a Korea University   (South Korea)

^b Inha University   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; INDIUM; OPTICAL PROPERTIES; REFRACTIVE INDEX; THICK FILMS; THIN FILMS; TIN; TITANIUM COMPOUNDS;

EXTINCTION CO-EFFICIENT; INCIDENT ANGLES; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; OBLIQUE-ANGLE DEPOSITION; OPTICAL AND ELECTRICAL PROPERTIES; PHYSICAL PROPERTIES; SUBSTRATE ROTATION;

OXIDE FILMS;

EID: 52649086354     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0312     Document Type: Article

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