Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3352-3355

  Wang, Sumei ^a,b   Xia, Guodong ^a,b   Fu, Xiaoyong ^a,b   He, Hongbo ^a   Shao, Jianda ^a   Fan, Zhengxiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Birefringence; Glancing angle deposition; Structure; ZrO2 films

Indexed keywords

BIREFRINGENCE; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; REFRACTIVE INDEX; SYNTHESIS (CHEMICAL); ZIRCONIUM COMPOUNDS;

GLANCING ANGLE DEPOSITION (GLAD); INCIDENT ANGLE; ZRO2 FILMS;

THIN FILMS;

EID: 33846905529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.020     Document Type: Article

References (20)

1. Robbie K., and Brett M.J. J. Vac. Sci. Technol., A 15 (1997) 1460
2. Popta A.C., Hawkeye M.M., Sit J.C., and Brett M.J. Opt. Lett. 29 (2004) 2545
3. Karabacak T., Singh J.P., Zhao Y.P., Wang G.C., and Lu T.M. Phys. Rev., B 68 (2003) 125408
4. Robbie K., Beydaghyan G., and Brown T. Rev. Sci. Instrum. 75 (2004) 1089
5. Messier R., Venugopal V.C., and Sunal P.D. J. Vac. Sci. Technol., A 18 (2000) 1538
6. Dick B., Brett M.J., and Smy T. J. Vac. Sci. Technol., B 21 (2003) 23
7. Robbie K., and Brett M.J. J. Vac. Sci. Technol., A 13 (1995) 2991
8. Lintymer J., Martin N., Chappe J.M., Delobelle P., and Takadoum J. Surf. Coat. Technol. 180 (2004) 26
9. Venugopal V.C., and Lakhtakia A. Opt. Commun. 149 (1998) 217
10. Qi H.J., Tang Z.S., Shao J.D., and Fan Z.X. Thin Solid Films 444 (2003) 146
11. Shao S.Y., Fan Z.X., Shao J.D., and He H.B. Thin Solid Films 445 (2003) 59
12. Ciosek J., Paszkowicz W., and Pankowski P. Vacuum 72 (2004) 135
13. Tait R.N., Smy T., and Brett M.J. Thin Solid Films 226 (1993) 196
14. Swanepoel R. J. Phys. E: Sci. Instructrum. 16 (1983) 1214
15. Macleod H.A. Thin-Film Optical Filters (2001), Institute of Physics Publishing, London 87
16. Stroud D. Superlattices Microstruct. 23 (1998) 567
17. Beydaghyan G., Kaminska K., Brown T., and Robbie K. Appl. Opt. 43 (2004) 5343
18. Wang J.G., Shao J.D., Wang S.M., He H.B., and Fan Z.X. Chin. Phys. Lett. 22 (2005) 2066
19. Wang J.G., Shao J.D., and Fan Z.X. Opt. Commun. 247 (2005) 107
20. Hodgkinson I., and Wu Q.H. Appl. Opt. 38 (1999) 3621