Optical and structural properties of ZrO2 thin films fabricated by using glancing angle deposition

Journal of the Korean Physical Society

Volumn 53, Issue 5 PART 1, 2008, Pages 2544-2548

  Sobahan, K M A ^a   Park, Yong Jun ^a   Hwangbo, Chang Kwon ^a  

^a Inha University   (South Korea)

Author keywords

Birefringence; Glancing angle deposition

Indexed keywords

EID: 57349104422     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.53.2544     Document Type: Conference Paper

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