Microchannel surface area enhancement using porous thin films

Journal of the Electrochemical Society

Volumn 147, Issue 5, 2000, Pages 2002-2006

  Harris, Kenneth D ^a   Brett, Michael J ^a   Smy, Tom J ^b   Backhouse, Christopher ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; MICROSTRUCTURE; PHOTORESISTS; POROSIMETERS; SILICA; SURFACE ROUGHNESS;

GLANCING ANGLE DEPOSITION; MICROCHANNEL SURFACE AREA ENHANCEMENT; POROSIMETRY;

THIN FILMS;

EID: 0033728282     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393475     Document Type: Article

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