Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 10294, Issue , 1999, Pages 29-58

  Johs, Blaine ^a   Woollam, John A ^a   Herzinger, Craig M ^a   Hilfiker, James N ^a   Synowicki, Ron A ^a   Bungay, Corey L ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

advanced instrumentation; anisotropy; depolarization; ellipsometry; Mueller matrix.; multi sample analysis; parametric models

Indexed keywords

ANISOTROPY; DEPOLARIZATION; MATRIX ALGEBRA; SPECTROSCOPIC ELLIPSOMETRY; UNITS OF MEASUREMENT;

ADVANCED APPLICATIONS; ADVANCED INSTRUMENTATION; DATA ANALYSIS TECHNIQUES; MUELLER MATRIX; MULTI-SAMPLES; PARAMETRIC MODELS; TYPICAL APPLICATION; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 84962672149     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.351667     Document Type: Conference Paper

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