Impact of morphology on high-speed humidity sensor performance

IEEE Sensors Journal

Volumn 6, Issue 1, 2006, Pages 24-27

  Steele, John J ^b   Gospodyn, James P ^b   Sit, Jeremy C ^a,b   Brett, Michael J ^a,b  

^a IEEE   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Glancing angle deposition (GLAD); Humidity; Nanostructured; Porous; Thin film

Indexed keywords

GLANCING ANGLE DEPOSITION (GLAD); NANOSTRUCTURED; POROS; SENSOR PERFORMANCE;

ALUMINA; ATMOSPHERIC HUMIDITY; CAPACITANCE; DEPOSITION; NANOSTRUCTURED MATERIALS; THIN FILMS;

SENSORS;

EID: 31144433435     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.859359     Document Type: Article

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