Advanced techniques for glancing angle deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1115-1122

  Robbie, K ^a   Sit, J C ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001403899     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590019     Document Type: Article

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