Effect of deposition angle on the optical and the structural properties of Ta2O5 thin films fabricated by using glancing angle deposition

Journal of the Korean Physical Society

Volumn 55, Issue 3, 2009, Pages 1272-1277

  Sobahan, K M A ^a   Park, Yong Jun ^a   Hwangbo, Chang Kwon ^a  

^a Inha University   (South Korea)

Author keywords

Birefringence; Glancing angle deposition

Indexed keywords

EID: 70350329000     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.55.1272     Document Type: Article

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