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Journal of Applied Physics

Volumn 109, Issue 8, 2011, Pages

On the uniformity of films fabricated by glancing angle deposition

(2) Wakefield, Nicholas G a Sit, Jeremy C a

a UNIVERSITY OF ALBERTA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTHAL ROTATION; DEPOSITION ANGLE; FILM DENSITY; FILM PARAMETERS; GEOMETRIC CONDITIONS; GEOMETRIC FRAMEWORK; GLANCING ANGLE DEPOSITION; GLANCING ANGLE DEPOSITION TECHNIQUE; NON-UNIFORMITIES; PER UNIT; SIZE AND POSITION; SPECIFIC INFORMATION; SUBSTRATE TILTS;

GEOMETRY; PHYSICAL VAPOR DEPOSITION; ROTATION; SUBSTRATES;

DEPOSITION;

EID: 79955720508 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3559748 Document Type: Article

Times cited : (13)

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