Sculptured thin films and glancing angle deposition: Growth mechanics and applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1460-1465

  Robbie, K ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOM DIFFUSION; ATOMIC SHADOWING; CAPPING LAYER; CAPPING PROCESS; CHEMICAL DEVICES; COLUMNAR THIN FILMS; DENSITY MEASUREMENTS; EFFECTIVE REFRACTIVE INDEX; FILM STRUCTURE; GLANCING ANGLE DEPOSITION; GROWTH MECHANICS; GROWTH MECHANISMS; INCIDENT FLUX; POROUS FILM; SCANNING ELECTRONS; SCULPTURED THIN FILMS; THIN-FILM DEPOSITION TECHNIQUE; THREE-DIMENSIONAL MICROSTRUCTURES;

BIOLOGICAL MATERIALS; FILM GROWTH; MECHANICS; MICROSTRUCTURE; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

DEPOSITION;

EID: 78649937207     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580562     Document Type: Article

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10. D. Lamy, A. C. Pierce, and R. B. Heimann, J. Mater. Res. 11, (1996).