Thermal oxidation of periodically aligned silicon square-spirals

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1222-1224

  Summers, M A ^a   Brett, M J ^a,b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Glancing angle deposition; Silicon; Square spiral; Template inversion; Thermal oxidation; Thin film

Indexed keywords

OXIDATION; PHOTONIC CRYSTALS; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; THIN FILMS;

GLANCING ANGLE DEPOSITION; OXIDATION TEMPERATURE; THERMAL OXIDATION;

SILICON WAFERS;

EID: 44149105191     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.050     Document Type: Article

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