Fabrication of silicon submicrometer ribbons by glancing angle deposition

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 3, 2005, Pages

  Summers, Mark ^a   Djurfors, Barbara ^a,b   Brett, Michael ^a,c,d  

^a UNIVERSITY OF ALBERTA   (Canada)

^b Department of Chemical and Materials Engineering ^*

^c Thin Film Engineering

^d Icore Nanoscale Engineering Physics Initiative

Author keywords

Angle deposition; Electron beam lithography; Ribbons; Silicon; Thin film deposition

Indexed keywords

ANGLE DEPOSITION; RIBBONS; SUBMICROMETER SCALE; THIN FILM DEPOSITION;

DEPOSITION; ELECTRON BEAM LITHOGRAPHY; FABRICATION; NANOTECHNOLOGY; SILICON; THIN FILMS;

FLAT CABLES;

EID: 33644760766     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2036991     Document Type: Article

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