Structure and optical properties of Nb 2 O 5 sculptured thin films by glancing angle deposition

Applied Surface Science

Volumn 255, Issue 5 PART 1, 2008, Pages 2192-2195

  Xiao, Xiudi ^a,b   Dong, Guoping ^a,b   Xu, Cheng ^a,b   He, Hongbo ^a   Qi, Hongji ^a,c   Fan, Zhengxiu ^a   Shao, Jianda ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c Crea Mech Company Ltd   (China)

Author keywords

Birefringence; Glancing angle deposition; Nb 2 O 5 sculptured thin films

Indexed keywords

BIREFRINGENCE; MICROSTRUCTURE; NIOBIUM OXIDE; REFRACTIVE INDEX; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

DEPOSITION ANGLE; DEPOSITION PARAMETERS; ELECTRON BEAM EVAPORATION; GLANCING ANGLE DEPOSITION; PACKING DENSITY; SCULPTURED THIN FILMS; UV-VIS-NIR SPECTRA;

DEPOSITION;

EID: 56949097055     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.07.071     Document Type: Article

References (21)

1. Robbie K., Beydaghyan G., Brown T., Dean C., Adams J., and Buzea C. Rev. Sci. Instrum. 75 (2004) 1089
2. Popta A., Hawkeye M., Sit J., and Brett M.J. Opt. Lett. 29 (2004) 2545
3. Suzuki M., Ito T., and Taga Y. Appl. Phys. Lett. 78 (2001) 3968
4. Kiema G.K., Colgan M.J., and Brett M.J. Sol. Energy Mater. Sol. C 85 (2005) 321
5. Ertekin E., and Lakhtakia A. Eur. Phys. J. Appl. Phys. 5 (1999) 45
6. Robbie K., Broer D.J., and Brett M.J. Nature 399 (1999) 764
7. Reichmann B., and Bard A.J. J. Electrochem. Soc. 127 (1980) 241
8. Xia J.B., Masaki N., Jiang K.J., and Yanagida S. J. Photochem. Photobiol. A 188 (2007) 120
9. Gimon-Kinsel M.E., and Balkus Jr. K.J. Micropor. Mesopor. Mater. 28 (1999) 113
10. Wang S., Fu X., Xia G., Wang J., Shao J., and Fan Z. Appl. Surf. Sci. 252 (2006) 8734
11. Robbie K., and Brett M.J. J. Vac. Sci. Technol. A 15 (1997) 1460
12. Kranenburg V.H., and Lodder C. Mater. Sci. Eng. R 11 (1994) 295
13. Brian D., and Michael B.J. Encyclopedia Nanosci. Nanotechnol. 6 (2004) 703
14. Beydaghyan G., Kaminska K., Brown T., and Robbie K. Appl. Opt. 43 (2004) 5343
15. Nieuwenhizen J.M., and Haanstra H.B. Philips Tech. Rev. 27 (1996) 87
16. Tait R.N., Smy T., and Brett M.J. Thin Solid Films 226 (1993) 196
17. Hodgkinson I., and Wu Q.H. Appl. Opt. 37 (1998) 2653
18. Swanepoel R. J. Phys. E: Sci. Instrum. 16 (1983) 1241
19. Stroud D. Superlattice Microst. 23 (1998) 567
20. Motohiro T., and Taga Y. Appl. Opt. 28 (1989) 2466
21. Wang J.G., Shao J.D., and Fan Z.X. Opt. Commun. 247 (2005) 107