Mechanism of columnar microstructure growth in titanium oxide thin films deposited by ion-beam assisted deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3379-3384

  Tang, Qi ^a   Kikuchi, Kazuo ^a   Ogura, Shigetaro ^b   Macleod, Angus ^c  

^a Shincron Co Ltd   (Japan)

^b KOBE DESIGN UNIVERSITY   (Japan)

^c Thin Film Cent Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033419511     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582069     Document Type: Article

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