Texture evolution of transition-metal nitride thin films by ion beam assisted deposition

Thin Solid Films

Volumn 446, Issue 2, 2004, Pages 184-193

  Ma, C H ^a   Huang, J H ^a,b   Chen, Haydn ^a,c  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

In plane texture; Ion beam; Transition metal nitride

Indexed keywords

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; CRYSTALS; ELASTIC MODULI; ION BEAM ASSISTED DEPOSITION; PERTURBATION TECHNIQUES; PROTECTIVE COATINGS; RADIATION DAMAGE; TEXTURES; TRANSITION METAL COMPOUNDS; WEAR RESISTANCE;

ION ENERGY; ION FLUX; SURFACE ENERGY MINIMIZATION;

THIN FILMS;

EID: 0346119934     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.063     Document Type: Article

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