Birefringence enhancement in annealed Ti O2 thin films

Journal of Applied Physics

Volumn 102, Issue 1, 2007, Pages

  Van Popta, Andy C ^a   Cheng, June ^a   Sit, Jeremy C ^a   Brett, Michael J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; BIREFRINGENCE; ELECTRON BEAMS; EVAPORATION; FILM GROWTH; MAGNETIC ANISOTROPY; NANOSTRUCTURED MATERIALS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; TITANIUM DIOXIDE;

DEPOSITION ANGLES; ELECTRON BEAM EVAPORATION; THERMAL ANNEALING;

THIN FILMS;

EID: 34547186601     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2752132     Document Type: Article

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