Nanopowders and films of titanium oxide for photocatalysis: A review

Glass Physics and Chemistry

Volumn 36, Issue 2, 2010, Pages 121-157

  Shapovalov, V I ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

Film; Nanopowder; Oxide heterostructure; Photocatalysis; Titanium oxide

Indexed keywords

CATALYTIC ACTIVITY; HETEROSTRUCTURES; NANO POWDERS; PHOTOCATALYTIC PROPERTY; REACTIVE SPUTTERING METHOD; STRUCTURE OF FILMS; TIO;

CATALYST ACTIVITY; CRYSTAL STRUCTURE; HETEROJUNCTIONS; NANOSTRUCTURED MATERIALS; PHOTOCATALYSIS; TITANIUM; TITANIUM OXIDES;

OXIDE FILMS;

EID: 79951567322     PISSN: 10876596     EISSN: None     Source Type: Journal    
DOI: 10.1134/S108765961002001X     Document Type: Review

References (189)

1. 2 Photocatalytic Oxidation: I. Photocatalysts for Liquid-Phase and Gas-Phase Processes and the Photocatalytic Degradation of Chemical War-fare Agent Stimulants in a Liquid Phase, Kinet. Katal., 2005, vol. 46, no. 2, pp. 203-218 [Kinet. Catal. (Engl. transl.), 2005, vol. 46, no. 2, pp. 189-203].
2. [Kinet. Catal. (Engl. transl.), 2005, vol. 46, no. 2, pp. 189-203].
3. 2 Concentration on the Reaction Rate, Kinet. Katal., 1997, vol. 38, no. 1, pp. 83-89
4. [Kinet. Catal. (Engl. transl.), 1997, vol. 38, no. 1, pp. 70-76].
5. Fenelonov, V.B. and Parmon, V.N., Promyshlennyi kataliz v lektsiyakh, no. 1: Vvedenie v fizicheskuyu khimiyu formirovaniya tekstury geterogennykh kataliza-torov (Lectures on Industrial Catalysis, no. 1: Intro-duction to Physical Chemistry of Texture Formation of Heterogeneous Catalysts), Moscow: Kalvis, 2005.
6. Parmon, V.N., Photocatalysis as a Phenomenon-Aspects of Terminology, Catal. Today. A, 1997, vol. 39, no. 3, pp. 137-144.
7. Parmon, V.N., Rate-Limiting Steps, Rate-Determining Parameters, and Apparent Activation Energy of Step-wise Reactions:2 Simple Stepwise Consecutive Cata-lytic Reactions Linear in Respect to Intermediates, React. Kinet. Catal. Lett., 2003, vol. 79, no. 2, pp. 303-317.
8. Vorontsov, A.V., Savinov, E.N., Barannik, G.B., Troitsky, V.N., and Parmon, V.N., Quantitative Studies on the Heterogeneous Gas-Phase Photooxidation of (Pubitemid 127412944)
9. Zakharenko, V.S., Parmon, V.N., and Zamaraev, K.I., Photoadsorption and Photocatalytic Processes Influ-encing the Composition of the Earth's Atmosphere: I. Irreversible Photoadsorption of Freon-134a on Magnesia under Conditions Simulating Atmosphere, Kinet. Katal., 1997, vol. 38, no. 1, pp. 140-144
10. [Kinet. Catal. (Engl. transl.), 1997, vol. 38, no. 1, pp. 124-128]
11. 2 Photocatalytic Oxidation: II. Gas-Phase Processes, Kinet. Katal., 2005, vol. 46, no. 3, pp. 422-436 (Pubitemid 40924331)
12. [Kinet. Catal., (Engl. transl.), 2005, vol. 46, no. 3, pp. 450-465].
13. 2, Kinet. Katal., 1997, vol. 38, no. 1, pp. 97-101.
14. [Kinet. Catal. (Engl. transl.), 1997, vol. 38, no. 1, pp. 84-87]
15. Savinov, E.N., Photocatalytic Methods of Purification of Water and Air, Soros. Obraz. Zh., 2000, vol. 6, no. 11, pp. 52-56.
16. Tsodikov, M.V., Tephyakov, V.V., Magsumov, M.I., Shkol'nikov, E.I., Sidorova, E.V., Volkov, V.V., Kapteijn, F., Gora, L., Trusov, L.I., and Uvarov, V.I., Ceramic Membranes Modified with Catalytic Oxide Films as Ensembles of Catalytic Nanoreactors, Kinet. Katal., 2006, vol. 47, no. 1, pp. 29-39
17. [Kinet. Catal. (Engl. transl.), 2006, vol. 47, no. 1, pp. 25-34]
18. 2O with Surface Defects of Dispersed Titanium Dioxide, Kinet. Katal., 2004, vol. 45, no. 2, pp. 205-213
19. [Kinet. Catal. (Engl. transl.), 2004, vol. 45, no. 2, pp. 189-197]
20. Linsebigler, A.L., Lu, G., and Yates, J.T., Photocatal-ysis on TiOn Surfaces: Principles, Mechanisms, and Selected Results, Chem. Rev., 1995, vol. 95, pp. 735-758.
21. Hoffmann, M.R., Martin, S.T., Choi, W.Y., and Bahnemannt, D.W., Environmental Applications of Semi-conductor Photocatalysis, Chem. Rev., 1995, vol. 95, pp. 69-96.
22. Mills, A. and Le Hunte, S.J., An Overview of Semi-conductor Photocatalysis, J. Photochem. Photobiol., A, 1997, vol. 108, no. 1, pp. 1-35.
23. 2 Photocatalytic Oxidation: III. Gas-Phase Reactors, Kinet. Katal., 2005, vol. 46, no. 3, pp. 466-473 (Pubitemid 40887044)
24. [Kinet. Catal. (Engl. transl.), 2005, vol. 46, no. 3, pp. 437-444].
25. http://www.aerolife.nm.ru
26. http://www.aerolife.ru
27. Kozlov D.V. and Vorontsov A.V., Development of Technologies of Fabrication and Widespread Applica-tion of Photocatalytic Devices for Air Purification, Including the Construction and Mastering of Pilot Production, http://mdest.nsu.ru/resources/technol-ogy/photocatalist/photocatalist.pdf
28. Mills, A. and Lee, S.-K.J., A Web-Based Overview of Semiconductor Photochemistry-Based Current Com-mercial Applications, J. Photochem. Photobiol., A, 2002, vol. 152, nos. 1-3, pp. 233-247.
29. Huang, Z., Maness, P.-C., Blake, D.M., Wolfrum, E.J., and Smolinski, S.L., Bactericidal Mode of Titanium Dioxide Photocatalysis, J. Photochem. Photobiol., A, 2000, vol. 130, pp. 163-170.
30. Huang, Z., Maness, P.-C., Blake, D.M., Wolfrum, E.J., Smolinski, S.L., and Jacoby, W.A., Bactericidal Mode of Titanium Dioxide Photocatalysis, J. Photochem. Photobiol., A, 2000, vol. 130, pp. 163-170.
31. 2 Thin Film, J. Photochem. Photobiol., A, 2003, vol. 156, pp. 227-233. (Pubitemid 36285515)
32. Lawton, L.A., Robertson, P.K.J., Cornish, B.J.P.A., Marr, I.L., and Jaspars, M., Processes Influencing Surface Interaction and Photocatalytic Destruction of Microcystins on Titanium Dioxide Photocatalysts, J. Catal., 2003, vol. 213, no. 1, pp. 109-113.
33. 2 with the Aid of Superoxide-Dismutase, Chem. Lett., 1992, no. 3, pp. 427-430.
34. 2 on Its Performance as a Photocatalyst for Water Cleavage, J. Phys. Chem., 1993, vol. 97, no. 6, pp. 1184-1189.
35. 2, Chem. Mater., 1993, vol. 5, no. 3, pp. 280-283.
36. 2 Semiconductor Particulate Sys-tem, J. Photochem. Photobiol., A, 1992, vol. 67, no. 3, pp. 349-352.
37. 2 Particles by Sunlight in Aerated Water, J. Electrochem. Soc., 1992, vol. 139, no. 1, pp. 113-118.
38. 2 Particles: Identification of Intermediates and Mechanism of Reaction, Environ. Sci. Technol., 1993, vol. 27, no. 8, pp. 1681-1689. (Pubitemid 23240968)
39. 2 Suspensions, Environ. Sci. Technol., 1991, vol. 25, no. 3, pp. 494-500.
40. Carraway, E.R., Hoffman, A.J., and Hoffmann, M.R., Photocatalytic Oxidation of Organic Acids on Quan-tum-Sized Semiconductor Colloids, Environ. Sci. Technol., 1994, vol. 28, no. 5, pp. 786-793. (Pubitemid 24176970)
41. 2 Photo-catalyst, J. Mol. Catal., 1990, vol. 60, no. 3, pp. 295-311. (Pubitemid 20731599)
42. 2 Aqueous Suspensions: Kinetic Effects of the Positions of the Cl Atoms and Identification of the Intermediates, J. Photochem. Photobiol., A, 1993, vol. 72, no. 3, pp. 261-267.
43. 2 Aqueous Suspensions, Environ. Sci. Tech-nol., 1990, vol. 24, no. 7, pp. 990-996. (Pubitemid 20381838)
44. 2 Surface, J. Phys. Chem., 1992, vol. 96, no. 5, pp. 2226-2230.
45. 2 and ZnO, Coord. Chem. Rev., 1993, vol. 125, nos. 1-2, pp. 183-193.
46. Hoffmann, M.R., Martin, S.T., and Choi, W.Y., Environmental Applications of Semiconductor Photoca-talysis, Chem. Rev., 1995, vol. 95, pp. 69-96.
47. Yamashita, H., Harada, M., Misaka, J., Takeuchi, M., Ikeue, K., and Anpo, M., Degradation of Propanol Diluted in Water under Visible Light Irradiation Using Metal Ion-Implanted Titanium Dioxide Photocatalysts, J. Photochem. Photobiol., A, 2002, vol. 148, nos. 1-3, pp. 257-261.
48. Kobasa, I.M., Mazurkevich, Y.S., and Zozulya, N.I., Effect of Photochemical and Reductive Activation of Titanium Dioxide on Its Catalytic Properties in Depo-sition of Metallic Copper, Teor. Eksp. Khim., 2004, vol. 40, no. 2, pp. 110-115.
49. [Theor. Exp. Chem. (Engl. transl.), 2001, vol. 37, no. 1, pp. 58-62]
50. Khalyavka, T.A., Shimanovskaya, V.V., Strelko, V.V., and Kapinus, E.I., Photocatalytic Activity of Titanium Dioxide in the Degradation of Methylene Blue and Tetrachlorofluorescein in Aqueous Solutions, Teor. Eksp. Khim., 2001, vol. 37, no. 1, pp. 53-57
51. [Theor. Exp. Chem. (Engl. transl.), 2001, vol. 37, no. 1, pp. 58-62].
52. Minghua, Z., Juaguo, Y., Bei, C., and Huagen, Y., Preparation and Photocatalytic Activity of Fe-Doped Mesoporous Titanium Dioxide Nanocrystalline Photocatalysts, Mater. Chem. Phys., 2005, vol. 93, pp. 159-163.
53. 2 Supported on Alumina by Different Metal Organic Chemical Vapor Deposition Methods, Appl. Catal., A, 2005, vol. 282, pp. 285-293.
54. Albert, M., Gao, Y.M., Toft, D., Dwight, K., and Wold, A., Photoassisted Gold Deposition of Titanium Dioxide, Mater. Res. Bull., 1992, vol. 27, no. 8, pp. 961-966.
55. 2 Powder, J. Chem. Soc., Faraday Trans., 1993, vol. 89, no. 1, pp. 129-133.
56. Borgarello, E., Serpone, N., Emo, G., Harris, R., Pelizzettie, E., and Minero, C., Light-Induced Reduction of Rhodium(III) and Palladium(II) on Titanium Dioxide Dispersions and the Selective Pho-tochemical Separation and Recovery of Gold(III), Platinum(IV), and Rhodium(III) in Chloride Media, Inorg. Chem., 1986, vol. 25, no. 25, pp. 4499-4503.
57. Mills, A., Hill, G., Bhopal, S., Parkin, I.P., and O'Neill, S.A., Thick Titanium Dioxide Films for Semiconductor Photocatalysis, J. Photochem. Photo-biol., A, 2003, vol. 160, pp. 185-194.
58. Fujishima, A., Rao, T.N., and Tryk, D.A., Titanium Dioxide Photocatalysis, J. Photochem. Photobiol., C, 2000, vol. 1, no. 1, pp. 1-21.
59. Wang, R., Hashimoto, K., Fujishima, A., Chikuni, M., Kojima, E., Kitamura, A., Shimohigoshi, M., and Watanabe, T., Light-Induced Amphiphilic Surfaces, Nature, 1997, vol. 388, no. 6641, pp. 431-432.
60. 2 Thin Film Surfaces by the Reciprocal of Contact Angle, J. Phys. Chem. B, 2003, vol. 107, no. 4, pp. 1028-1035.
61. Yoshioka, K., Petrykin, V., Kakihana, M., Kato, H., and Kido, A., The Relationship between Photocatalytic Activity and Crystal Structure in Strontium Tantalates, J. Catal., 2005, vol. 232, pp. 102-107. (Pubitemid 40573289)
62. Yang, T.-S., Shiu, C.-B., and Wong, M.-S., Structure and Hydrophilicity of Titanium Oxide Films Prepared by Electron Beam Evaporation, Surf. Sci., 2004, vol. 548, pp. 75-82.
63. Li, F.B. and Li, X.Z., Photocatalytic Properties of Gold/Gold Ion-Modified Titanium Dioxide for Wastewater Treatment, Appl. Catal., A, 2002, vol. 228, pp. 15-27. (Pubitemid 34524135)
64. 2(110) Surfaces: A Comparative XPS, UPS, ISS, and ESD Study, Surf. Sci., 1996, vol. 345, pp. 261-273. (Pubitemid 126367484)
65. 2, Surf. Sci., 1994, vol. 315, no. 3, pp. 351-361.
66. Vogt, K.W., Kohl, P.A., Carter, W.B., Bell, R.A., and Bottomley, L.A., Characterization of Thin Titanium Oxide Adhesion Layers on Gold: Resistivity, Morphology, and Composition, Surf. Sci., 1994, vol. 301, nos. 1-3, pp. 203-213.
67. 2 Thin Films, J. Phys. Chem. Solids, 1999, vol. 60, no. 2, pp. 201-210.
68. Hou, Y.-Q., Zhuang, D.-M., Zhang, G., Zhao, M., and Wu, M.-S., Influence of Annealing Temperature on the Properties of Titanium Oxide Thin Film, Appl. Surf. Sci., 2003, vol. 218, nos. 1-4, pp. 98-106.
69. 2(II), J. Phys. Chem. Solids, 1979, vol. 40, pp. 1129-1140. (Pubitemid 10440959)
70. 2), J. Phys. Chem. Solids, 1994, vol. 55, no. 11, pp. 1309-1313.
71. 2 Photocatalysts Suspended in Aqueous Solutions, J. Photochem. Pho-tobiol., A, 2000, vol. 132, pp. 99-104.
72. Hiramoto, M., Hashimoto, K., and Sakata, T., Electron Transfer and Photoluminescence Dynamics of CdS Particles Deposited on Porous Vycor Glass, Chem. Phys. Lett., 1987, vol. 133, no. 5, pp. 440-444.
73. Ohno, T., Haga, D., Fujihara, K., Kaizaki, K., and Matsumura, M., Unique Effects of Iron(III) Ions on Photocatalytic and Photoelectrochemical Properties of Titanium Dioxide, J. Phys. Chem. B, 1997, vol. 101, no. 33, pp. 6415-6419. (Pubitemid 127591296)
74. 3 Electrodes: Estimation from Comparison of Photoluminescence and Photocurrent, J. Photochem. Photobiol., A, 1999, vol. 129, no. 3, pp. 143-146.
75. Ahmed, S., Jones, C.E., Kemp, T.J., and Unwin, P.R., The Role of Mass Transfer in Solution Photocatalysis at a Supported Titanium Dioxide Surface, Phys. Chem. Chem. Phys., 1999, vol. 1, pp. 5229-5233.
76. Tan, T.T.Y., Zaw, M., Beydoun, D., and Amal, R., The Formation of Nano-Sized Selenium-Titanium Dioxide Composite Semiconductors by Photocatalysis, J. Nanopart. Res., 2002, vol. 4, pp. 541-552.
77. Cermenati, L., Dondi, D., Fagnoni, M., and Albini, A., Titanium Dioxide Photocatalysis of Adamantane, Tet-rahedron, 2003, vol. 59, pp. 6409-6414. (Pubitemid 36930127)
78. Almquist, C.B. and Biswas, P., The Photo-Oxidation of Cyclohexane on Titanium Dioxide: An Investigation of Competitive Adsorption and Its Effects on Product Formation and Selectivity, Appl. Catal., A, 2001, vol. 214, pp. 259-271.
79. Li, X. and Kutal, C.J., Photocatalytic Selective Epoxidation of Styrene by Molecular Oxygen over Highly Dispersed Titanium Dioxide Species on Silica, J. Mater. Sci. Lett., 2002, vol. 21, pp. 1525-1527. (Pubitemid 35289608)
80. 2 Films: A Novel Approach to Studying Photoinduced Protein/Electrode Transfer Reactions, Faraday Discuss., 2000, vol. 116, pp. 35-46.
81. Bellobono, I.R., Morelli, R., and Chiodaroli, C.M.J., Photocatalysis and Promoted Photocatalysis during Photocrosslinking of Multifunctional Acrylates in Composite Membranes Immobilizing Titanium Dioxide, J. Photochem. Photobiol., A, 1997, vol. 105, pp. 89-94. (Pubitemid 127166391)
82. 2 Photocatalysts under Visible Illumination, J. Phys. Chem. B, 2004, vol. 108, no. 45, pp. 17269-17273.
83. Mills, A., Lee, S.-K., and Lepre, A., Photodecomposition of Ozone Sensitized by a Film of Titanium Dioxide on Glass, J. Photochem. Photobiol., A, 2003, vol. 155, nos. 1-3, pp. 199-205. (Pubitemid 36196824)
84. Li, X., Quan, X., and Kutal, C., Synthesis and Photo-catalytic Properties of Quantum Confined Titanium Dioxide Nanoparticle, Scr. Mater., 2004, vol. 50, pp. 499-505.
85. Linsebigler, A., Lu, G., and Yates, J.T., Photocatalysis on TiOn Surfaces: Principles, Mechanisms, and Selected Results, Chem. Rev., 1995, vol. 95, pp. 735-758.
86. 2 Suspension in a 1 N H2SO4 Solution, Kinet. Katal., 1997, vol. 37, no. 3, pp. 427-430
87. [Kinet. Catal. (Engl. transl.), 1997, vol. 37, no. 3, pp. 402-405].
88. Kryukova, G.N., Zenkovets, G.A., and Parmon, V.N., HREM Study of Nanostructured Molybdenum and Vanadium Doped Titania Catalysts, React. Kinet. Catal. Lett., 2000, vol. 71, pp. 173-176.
89. 2, J. Colloid Interface Sci., 1997, vol. 191, pp. 464-470.
90. 2 Particles, Colloids Surf., A, 1998, vol. 131, pp. 271-280. (Pubitemid 28138795)
91. 3 Employed for Phenol Photodegradation in Aqueous Suspension, Sol. Energy. Mater. Sol., 1998, vol. 51, pp. 203-219. (Pubitemid 128430946)
92. 2 Catalysts, Appl. Surf. Sci., 1997, vols. 121-122, pp. 525-529. (Pubitemid 127377795)
93. 2: Correlation between Photoreactivity and Charge Carrier Recombination Dynamics, J. Phys. Chem., 1994, vol. 98, pp. 13669-13679.
94. 2 Photocatalyst, J. Catal., 1999, vol. 20, no. 3, pp. 329-332.
95. 3+ Ions for Photocatalysis, Mater. Lett., 2002, vol. 57, pp. 794-801. (Pubitemid 35405746)
96. 2 Catalysts, Appl. Surf. Sci., 1997, vols. 121-122, pp. 525-529. (Pubitemid 127377795)
97. 2, Nucl. Instrum. Methods Phys. Res., Sect. B, 1997, vol. 121, nos. 1-4, pp. 503-506. (Pubitemid 127426883)
98. 2, Phys. Rev. B: Condens. Matter, 1983, vol. 28, no. 6, pp. 3427-3438.
99. 2 Using LEED, ARXPS and MEED, Surf. Sci., 1993, vol. 291, no. 1, pp. 381-394. (Pubitemid 23676980)
100. 2-Based Photocatalysts, J. Phys. Chem. B, 1998, vol. 102, no. 52, pp. 10871-10878. (Pubitemid 128716600)
101. Borgarello, E., Kiwi, J., Graetzel, M., Pelizzetti, E., and Visca, M., Visible Light Induced Water Cleavage in Colloidal Solutions of Chromium-Doped Titanium Dioxide Particles, J. Am. Chem. Soc., 1982, vol. 104, no. 11, pp. 2996-3002.
102. Selcuk, H., Sene, J.J., Valnice, M., Zanoni, B., Sarikaya, H.Z., and Anderson, M.A., Behavior of Bro-mide in the Photoelectrocatalytic Process and Bromine Generation Using Nanoporous Titanium Dioxide Thin-Film Electrodes, Chemosphere, 2004, vol. 54, pp. 969-974. (Pubitemid 38120573)
103. Valnice, M., Zanonil, B., Sene, J.J., and Anderson, M.A., Photoelectrocatalytic Degradation of Remazol Bril-liant Orange 3R on Titanium Dioxide Thin-Film Electrodes, J. Photochem. Photobiol., A, 2003, vol. 157, pp. 55-63. (Pubitemid 36437543)
104. 2-Based Nano-Sized Powders for Use in Thick-Film Gas Sensors for Atmospheric Pol-lutant Monitoring, J. Sol-Gel Sci. Technol., 2001, vol. 22, pp. 167-179. (Pubitemid 32949842)
105. Wei, D.T., Ion-Beam Interference Coating for Ultralow Optical Loss, Appl. Opt., 1989, vol. 28, no. 14, pp. 2813-2816.
106. 2 Dielectrics on Silicon Substrates, Appl. Phys. Lett., 1996, vol. 69, no. 25, pp. 3860-3862. (Pubitemid 126593073)
107. Mao, A.Y., Son, K.A., White, J.M., Kwong, D.L., Roberts, D.A., and Vrtis, R.N., Effects of Vacuum and Inert Gas Annealing of Ultrathin Tantalum Pentoxide Films on Si(100), J. Vac. Sci. Technol., A, 1999, vol. 17, no. 3, pp. 954-960. (Pubitemid 129650465)
108. 2)-Based Gate Insulators, IBM J. Res. Dev., 1999, vol. 43, no. 3, pp. 383-392.
109. 2 Films Deposited from Ceramic Targets, Surf. Sci., 2001, vols. 482-485, pp. 940-945. (Pubitemid 33732613)
110. 2 Films Prepared by R.F. Magnetron Sputtering at a Low Temperature, Thin Solid Films, 1996, vols. 281-282, nos. 1-2, pp. 427-430. (Pubitemid 126388134)
111. 2 Thin Films Prepared by Aqueous Sol-Gel Process at Low Temperature, Thin Solid Films, 2002, vol. 405, pp. 50-54. (Pubitemid 34182487)
112. Wiggins, M.D., Nelson, M.C., and Aita, C.R., Phase Development in Sputter Deposited Titanium Dioxide, J. Vac. Sci. Technol., A, 1996, vol. 14, no. 3, pp. 772-776.
113. 2 Films, J. Appl. Phys., 1992, vol. 71, no. 3, pp. 1421-1427.
114. Nadel, S.J., Greene, P., Rietzel, J., and Strumpfel, J., Equipment, Materials, and Processes: A Review of High Rate Sputtering Technology for Glass Coating, Thin Solid Films, 2003, vol. 442, pp. 11-14.
115. Larsson, C., Emanuelsson, L., Thomsen, P., Ericson, L.E., Aronsson, B.-O., Kasemo, B., and Lausmaa, J., Bone Response to Surface Modified Titanium Implants-Studies on the Tissue Response after 1 Year to Machined and Electropolished Implants with Different Oxide Thicknesses, J. Mater. Sci. Mater. Med., 1997, vol. 8, no. 12, pp. 721-729. (Pubitemid 28005904)
116. Leng, Y.X., Chen, J.Y., Zeng, Z.M., Tian, X.B., Yang, P., Huang, N., Zhou, Z.R., and Chu, P.K., Properties of Titanium Oxide Biomaterials Synthesized by Titanium Plasma Immersion Ion Implantation and Reactive Ion Oxidation, Thin Solid Films, 2000, vols. 377-378, pp. 573-577. (Pubitemid 32035273)
117. Scharnweber, D., Beutner, R., Rösler, S., and Worch, H., Electrochemical Behavior of Titanium-Based Mate-rials-Are There Relations to Biocompatibility?, J. Mater. Sci.: Mater. Med., 2002, vol. 13, pp. 1215-1220. (Pubitemid 36169461)
118. Feng, B., Chen, J.Y., Qi, S.K., He, L., Zhao, J.Z., and Zhang, X.D., Characterization of Surface Oxide Films on Titanium and Bioactivity, J. Mater. Sci.: Mater. Med., 2002, vol. 13, no. 5, pp. 457-464. (Pubitemid 34454477)
119. Leng, Y.X., Huang, N., Yang, P., Chen, J.Y., Sun, H., Wang, J., Wan, G.J., Leng, Y., and Chu, P.K., Influence of Oxygen Pressure on the Properties and Biocompatibility of Titanium Oxide Fabricated by Metal Plasma Ion Implantation and Deposition, Thin Solid Films, 2002, vols. 420-421, pp. 408-413. (Pubitemid 35459757)
120. Feng, B., Weng, J., Yang, B.C., Qu, S.X., and Zhang, X.D., Characterization of Surface Oxide Films on Titanium and Adhesion of Osteoblast, Biomaterials, 2003, vol. 24, no. 25, pp. 4663-4670. (Pubitemid 37013627)
121. Huang, N., Yang, P., Leng, Y.X., Chen, J.Y., Sun, H., Wang, J., Wang, G.J., Ding, P.D., Xi, T.F., and Leng, Y., Hemocompatibility of Titanium Oxide Films, Biomaterials, 2003, vol. 24, no. 13, pp. 2177-2187. (Pubitemid 36434035)
122. Hiromoto, S., Hanawa, T., and Asam, K., Composi-tion of Surface Oxide Film of Titanium with Culturing Murine Fibroblasts L929, Biomaterials, 2004, vol. 25, no. 6, pp. 979-986. (Pubitemid 37393289)
123. Negishi, N., Takeuchi, K., and Ibusuki, T., The Surface Structure of Titanium Dioxide Thin Film Photocatalyst, Appl. Surf. Sci., 1997, vol. 121-122, pp. 417-420. (Pubitemid 127377771)
124. 2 Thin Films, J. Mater. Sci. Lett., 2000, vol. 19, pp. 1015-1017.
125. 2 Thin Film Prepared by Sol-Gel Process on a Soda-Lime Glass, J. Sol-Gel Sci. Technol., 2000, vol. 19, pp. 71-76. (Pubitemid 32136120)
126. 2 Film on Glass, Sol-Gel Sci. Tech-nol., 2001, vol. 22, pp. 47-52. (Pubitemid 32949830)
127. 2 Thin Film Photocatalysts by Dip Coating Using a Highly Viscous Solvent, Sol-Gel Sci. Technol., 2001, vol. 22, pp. 23-31. (Pubitemid 32949827)
128. 2 Thin Film Photocatalyst, J. Mater. Sci., 1998, vol. 33, pp. 5789-5794. (Pubitemid 128511223)
129. 2 Thin Film Photocatalyst by the Dip-Coating Process, J. Sol-Gel Sci. Technol., 1998, vol. 13, pp. 691-694.
130. O'Neill, S.A., Parkin, I.P., Clark, R.J.H., Mills, A., and Elliott, N., Atmospheric Pressure Chemical Vapour Deposition of Titanium Dioxide Coatings on Glass, J. Mater. Chem., 2002, vol. 13, no. 1, pp. 56-60.
131. 2 CVD Films on Quartz, Photochem. Pho-tobiol. Sci., 2002, vol. 1, no. 11, pp. 865-868. (Pubitemid 37069811)
132. 2 CVD Films for Semiconduc-tor Photocatalysis, J. Photochem. Photobiol., A, 2002, vol. 151, no. 1, pp. 171-179.
133. Justicia, I., Garcia, G., Vazquez, L., Santiso, J., Orde-jon, P., Battiston, G., Gerbasi, R., and Figueras, A., Self-Doped Titanium Oxide Thin Films for Efficient Visible Light Photocatalysis: An Example: Nonylphe-nol Photodegradation, Sens. Actuators, B, 2005, vol. 109, pp. 52-56.
134. Masahiko, M. and Teruyoshi, W., Evaluation of Photocatalytic Properties of Titanium Oxide Films Prepared by Plasma-Enhanced Chemical Vapor Deposi-tion, Thin Solid Films, 2005, vol. 489, pp. 320-324.
135. 2 Model Thin Film, J. Phys. Chem. B, 2004, vol. 108, no. 45, pp. 17466-17476.
136. Justicia, I., Garcia, G., Battison, G.A., Gerbasi, R., Ager, F., Guerra, M., Caixach, J., Pardo, J.A., Rivera, J., and Figueras, A., Photocatalysis in the Visible Range of Sub-Stoichiometric Anatase Films Prepared by MOCVD, Electrochim. Acta, 2005, vol. 50, pp. 4605-4608. (Pubitemid 41164381)
137. Takeuchi, M., Tsujimaru, K., Sakamoto, K., Mat-suoka, M., Yamashita, H., and Anpo, M., Effect of Pt Loading on the Photocatalytic Reactivity of Tita-nium Oxide Thin Films Prepared by Ion Engineering Techniques, Res. Chem. Intermed., 2003, vol. 29, no. 6, pp. 619-629.
138. 2 Thin Films Made by Reactive Electron Beam Evaporation, J. Vac. Sci. Technol., A, 2003, vol. 21, no. 1, pp. 76-83.
139. 2 Thin Films, J. Phys. D: Appl. Phys., 1998, vol. 31, pp. 1149-1154. (Pubitemid 128594750)
140. Hiratani, M., Kadoshima, M., Hirano, T., Shima-moto, Y., Matsui, Y., Nabatame, T., Torii, K., and Kimura, S., Ultra-Thin Titanium Oxide Film with a Rutile-Type Structure, Appl. Surf. Sci., 2003, vol. 207, nos. 1-4, pp. 13-19.
141. 2 Films Prepared by Radio Frequency Magnetron Sputtering, J. Vac. Sci. Tech-nol., A, 2002, vol. 20, no. 2, pp. 388-393. (Pubitemid 34405106)
142. 2 Ultra-Thin Films, Surf. Sci., 2003, vol. 530, pp. 323-327.
143. 2 Films Deposited by DC Reactive Sputtering, J. Vac. Sci. Technol., A, 2002, vol. 20, no. 4, pp. 1205-1209. (Pubitemid 34882433)
144. 2 Photocatalyst Film Deposited by DC Reactive Magnetron Sputtering, Surf. Coat. Technol., 2004, vol. 182, pp. 192-198.
145. 2 Thin Films Prepared by Spray Pyrolysis and Magnetron Sputtering, J. Phys.: Condens. Matter, 2004, vol. 16, pp. 2335-2344.
146. Mikula, M., Ceppan, M., Kindernay, J., and Buc, D., Photoelectrochemical Properties of TiOx Layers Pre-pared by DC Pulsed Unbalanced Reactive Magnetron Sputtering, Cesk. Cas. Fyz. (Czech. J. Phys., Sect. A), 1999, vol. 49, no. 3, pp. 393-403.
147. 2 Nanorod Arrays Synthesized by Oxidizing Titanium with Acetone, J. Mater. Chem., 2004, vol. 14, pp. 2542-2548.
148. Wang, X., Zhang, F., Zheng, Z., Li, C., Chen, L., Wang, H., and Liu, X., Effect of O2 Pressure on the Synthesis of Titanium Oxide Film by Ion Beam Enhanced Deposition, Mater. Lett., 2000, vol. 44, no. 2, pp. 105-109.
149. 2 Film by Iron Doping Using Reactive Magnetron Sputtering, Chem. Phys. Lett., 2003, vol. 373, no. 3, pp. 333-337. (Pubitemid 36567488)
150. Wenjie, Z., Ying, L., Shenglong, Z., and Fuhui, W., Copper Doping in Titanium Oxide Catalyst Film Pre-pared by DC Reactive Magnetron Sputtering, Catal. Today, 2004, vols. 93-95, pp. 589-594.
151. 2 Film Prepared by Pulsed DC Reactive Magnetron Sputtering, J. Vac. Sci. Technol., A, 2003, vol. 21, no. 6, pp. 1877-1882.
152. Zywitzki, O., Modes, T., Sahm, H., Frach, P., Goedicke, K., and Glob, D., Structure and Properties of Crystalline Titanium Oxide Layers Deposited by Reactive Pulse Magnetron Sputtering, Surf. Coat. Technol., 2004, vols. 180-181, pp. 538-543. (Pubitemid 38473623)
153. Heller, J., Reactive Sputtering of Metals in Oxidizing Atmospheres, Thin Solid Films, 1973, vol. 17, pp. 163-176.
154. Barankova, H., Berg, S., Nender, C., and Carlsson, P., Hysteresis Effects in the Sputtering Process Using Two Reactive Gases, Thin Solid Films, 1995, vol. 260, no 2, pp. 181-186.
155. Hohnke, D.K., Schmatz, D.J., and Hurley, M.D., Reactive Sputter Deposition: A Quantitative Analysis, Thin Solid Films, 1984, vol. 118, pp. 301-310. (Pubitemid 15450598)
156. Kusano, E., An Investigation of Hysteresis Effects as a Function of Pumping Speed, Sputtering Current, and O2/Ar Ratio, in Ti-O2 Reactive Sputtering Processes, J. Appl. Phys., 1991, vol. 70, pp. 7089-7096.
157. Schiller, S., Beister, G., and Seiber, W., Reactive High Rate D.C. Sputtering: Deposition Rate, Stoichiome-try, and Features of TiOx and TiNx Films with Respect to the Target Mode, Thin Solid Films, 1984, vol. 111, pp. 259-268. (Pubitemid 14527877)
158. Steenbeck, K., Steinbeiss, E., and Ufert, K.-D., The Problem of Reactive Sputtering and Cosputtering of Elemental Targets, Thin Solid Films, 1982, vol. 92, pp. 371-380.
159. Belkind, A., Freilich, A., Lopez, J., Zhao, Z., Zhu, W., and Becker, K., Characterization of Pulsed DC Magnetron Sputtering Plasmas, New J. Phys., 2005, vol. 7, pp. 1-16.
160. Ogwu, A.A., Bounquerel, E., Ademosu, O., Moh, S., Crossan, E., and Placido, F., The Influence of RF Power and Oxygen Flow Rate during Deposition on the Optical Transmittance of Copper Oxide Thin Films Prepared by Reactive Magnetron Sputtering, J. Phys. D: Appl. Phys, 2005, vol. 38, pp. 266-271. (Pubitemid 40168811)
161. Schiller, S., Heisig, U., Steinfelder, K., and Strumpfel, J., Reactive D.C. Sputtering with the Magnetron-Plas-matron for Tantalum Pentoxide and Titanium Dioxide Films, Thin Solid Films, 1979, vol. 63, pp. 369-375.
162. Thornton, J.A., Substrate Heating in Cylindrical Magnetron Sputtering Sources, Thin Solid Films, 1978, vol. 54, pp. 23-31.
163. Jain, P., Juneja, J.S., Bahgwat, V., Rymaszewski, E.J., Lu, T.-M., and Cale, T.S., Effects of Substrate Tem-perature on Properties of Pulsed DC Reactively Sputtered Tantalum Oxide Films, J. Vac. Sci. Technol., A, 2005, vol. 23, no. 3, pp. 512-519. (Pubitemid 43119301)
164. Dushman, S., Scientific Foundations of Vacuum Tech-nique, New York: Wiley, 1962. Translated under the title Nauchnye osnovy vakuumnoi tekhniki, Moscow: Mir, 1964.
165. Von Keudell, A., Surface Processes during Thin Film Grow, Plasma Sources Sci. Technol., 2000, vol. 9, pp. 455-467. (Pubitemid 32020530)
166. Babu, P.M., Rao, G.V., Reddy, P.S., and Uthanna, S., Bias Voltage Dependence Properties of Cadmium Oxide Films Deposited by D.C. Reactive Magnetron Sputtering, J. Mater. Sci.: Mater. Electron., 2004, vol. 15, no. 6, pp. 389-394.
167. Kinio, O. and Oyanagi, J., Dynamic Control of Sub-strate Bias for Highly c-Axis Textured Thin Ferromagnetic CoCrTa Film in Inductively Coupled Plasma-Assisted Sputtering, J. Vac. Sci. Technol., A, 2005, vol. 23, no. 1, pp. 39-43. (Pubitemid 43126408)
168. Yang, Z.W., Han, S.H., Yang, T.L., Ye, L., Zhang, D.H., Ma, H.L., and Cheng, C.F., Bias Voltage Dependence of Properties for Depositing Transparent Conducting ITO Films on Flexible Substrate, Thin Solid Films, 2000, vol. 366, nos. 1-2, pp. 4-7.
169. 2 Thin Films, J. Vac. Sci. Technol., B, 2002, vol. 20, no. 1, pp. 263-270. (Pubitemid 34221420)
170. 2 Films Deposited by Off-Axis Target Sputtering, J. Vac. Sci. Technol., A, 2002, vol. 20, no. 6, pp. 1916-1920.
171. 2 Sputtered Films with Changing Degrees of Plasma Exposure, J. Vac. Sci. Technol., A, 2003, vol. 21, no. 4, pp. 1419-1423.
172. 3 Bilayers Deposited by Reactive Sputtering, J. Vac. Sci. Technol., A, 2003, vol. 21, no. 4, pp. 1409-1413.
173. 2 Films Prepared by RF Magnetron Sputtering, Appl. Surf. Sci., 2004, vol. 229, pp. 140-147.
174. 2 Photocatalytic Thin Film, J. Mater. Sci. Lett., 2002, vol. 21, no. 18, pp. 1465-1467. (Pubitemid 35236545)
175. Sheng, J., Shivalingappa, L., Karasawa, J., and Fukami, T., Low-Temperature Formation of Photo-catalytic Pt-Anatase Film by Magnetron Sputtering, J. Mater. Sci., 1999, vol. 34, no. 24, pp. 6201-6206. (Pubitemid 30524742)
176. 2 Thin Films Prepared by DC Magnetron Sputtering Used as a Photocatalyst, Renewable Energy, 2008, vol. 33, pp. 277-281. (Pubitemid 350180435)
177. Venkataraj, S., Severin, D., Mohamed, S.H., Ngaruiya, J., Kappertz, O., and Wuttig, M., Towards Understanding the Superior Properties of Transition Metal Oxynitrides Prepared by Reactive DC Magnetron Sputtering, Thin Solid Films, 2006, vol. 502, pp. 228-234. (Pubitemid 43290061)
178. Glaser, A., Surnev, S., Netzer, F.P., Fateh, N., Fontalvo, G.A., and Mitterer, C., Oxidation of Vanadium Nitride and Titanium Nitride Coatings, Surf. Sci., 2007, vol. 601, pp. 1153-1159. (Pubitemid 46204770)
179. Martin, N., Lintymer, J., Gavoille, J., Chappé, J.M., Sthal, F., Takadoum, J., Vax, F., and Rebouta, L., Reactive Sputtering of TiOxNy Coatings by the Reac-tive Gas Pulsing Process: Pt I. Pattern and Period of Pulses, Surf. Coat. Technol., 2007, vol. 201, pp. 7720-7726. (Pubitemid 46804410)
180. Martin, N., Lintymer, J., Gavoille, J., Chappé, J.M., Sthal, F., Takadoum, J., Vaz, F., and Rebouta, L., Reactive Sputtering of TiOxNy Coatings by the Reac-tive Gas Pulsing Process: Pt II. The Role of the Duty Cycle, Surf. Coat. Technol., 2007, vol. 201, pp. 7727-7732. (Pubitemid 46796650)
181. Martin, N., Lintymer, J., Gavoille, J., Chappé, J.M., Sthal, F., Takadoum, J., Vaz, F., and Rebouta, L., Reactive Sputtering of TiOxNy Coatings by the Reactive Gas Pulsing Process: Pt III. The Particular Case of Exponential Pulses, Surf. Coat. Technol., 2007, vol. 201, pp. 7733-7738. (Pubitemid 46796651)
182. Chappe, J.-M., Martin, N., Lintymer, J., Sthal, F., Terwagne, G., and Takadoum, J., Titanium Oxynitride Thin Films Sputter Deposited by the Reactive Gas Pulsing Process, Appl. Surf. Sci., 2007, vol. 253, pp. 5312-5316. (Pubitemid 46366040)
183. Lin, M.-C., Chang, L.-S., and Lin, H.C., Gas Barrier Properties of Titanium Oxynitride Films Deposited on Polyethylene Terephthalate Substrates by Reactive Magnetron Sputtering, Appl. Surf. Sci., 2008, vol. 254, pp. 3509-3516.
184. Song, X., Gopireddy, D., and Takoudis, C.G., Charac-terization of Titanium Oxynitride Films Deposited by Low Pressure Chemical Vapor Deposition Using Amide Ti Precursor, Thin Solid Films, 2008, vol. 516, pp. 6330-6335.
185. 2 Films by Low Energy Ion Irradiation, Appl. Surf. Sci., 2007, vol. 254, pp. 156-159. (Pubitemid 47539625)
186. 2 Photocatalytic Films Prepared by Reactive Magnetron Sputtering, Catal. Commun., 2004, vol. 5, pp. 677-680.
187. Gomez, M., Rodriguez, J., Lindquist, S.-E., and Granqvist, C.G., Photoelectrochemical Studies of Dye-Sensitized Polycrystalline Titanium Oxide Thin Films Prepared by Sputtering, Thin Solid Films, 1999, vol. 342, pp. 148-152.
188. Okada, M., Yamada, Y., Jin, P., Tazawa, M., and Yoshimura, K., Fabrication of Multifunctional Coating Which Combines Low-E Property and Visi-ble-Light-Responsive Photocatalytic Activity, Thin Solid Films, 2003, vol. 442, pp. 271-221.
189. 3 Composite Nanostructures on Glass by Anodization and the Sol-Gel Process: Fabrication and Photocatalytic Characteristics, J. Mater. Chem., 2003, vol. 13, no. 4, pp. 866-870.