Influence of oxygen pressure on the properties and biocompatibility of titanium oxide fabricated by metal plasma ion implantation and deposition

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 408-413

  Leng, Y X ^a   Huang, N ^a   Yang, P ^a,b   Chen, J Y ^a   Sun, H ^a   Wang, J ^a   Wan, G J ^a   Leng, Y ^c   Chu, Paul K ^b  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Composition; Metal plasma ion implantation and deposition; Microstructure; Sheet resistance; Titanium oxide

Indexed keywords

ADHESION; BIOCOMPATIBILITY; CRYSTAL STRUCTURE; DEPOSITION; ELECTRIC RESISTANCE; ION IMPLANTATION; OPTICAL FILMS; OXYGEN; PLASMAS; PRESSURE EFFECTS; THIN FILMS;

METAL PLASMA ION IMPLANTATION;

TITANIUM OXIDES;

EID: 0037011142     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00814-3     Document Type: Conference Paper

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