Structure and properties of anatase TiO2 thin films made by reactive electron beam evaporation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 76-83

  Van De Krol, Roel ^a   Goossens, Albert ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; EVAPORATION; MORPHOLOGY; PARTIAL PRESSURE; RAMAN SPECTROSCOPY; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ANATASE; CAPACITANCE VOLTAGE PROFILING; IMPEDANCE SPECTROSCOPY; REACTIVE ELECTRON BEAM EVAPORATION;

TITANIUM DIOXIDE;

EID: 0037263349     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1525817     Document Type: Article

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