Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process: Part III: The particular case of exponential pulses

Surface and Coatings Technology

Volumn 201, Issue 18, 2007, Pages 7733-7738

  Martin, N ^a   Lintymer, J ^a   Gavoille, J ^a   Chappe J M ^c   Sthal, F ^b   Takadoum, J ^a   Vaz, F ^c   Rebouta, L ^c  

^a Centre National de la Recherche Scientifique   (France)

^b FEMTO ST INSTITUTE   (France)

^c UNIVERSITY OF MINHO   (Portugal)

Author keywords

Exponential pulses; Reactive gas pulsing process (RGPP); Reactive sputtering; Titanium oxynitride

Indexed keywords

DEPOSITION; FLOW RATE; MAGNETRON SPUTTERING; REACTIVE SPUTTERING; TITANIUM COMPOUNDS;

DUTY CYCLE; EXPONENTIAL PULSES; MASS FLOW RATE; REACTIVE GAS PULSING PROCESS; TITANIUM OXYNITRIDE;

INORGANIC COATINGS;

DEPOSITION; FLOW RATE; INORGANIC COATINGS; MAGNETRON SPUTTERING; REACTIVE SPUTTERING; TITANIUM COMPOUNDS;

EID: 34249063078     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.03.022     Document Type: Article

References (19)

1. Westwood W. Phys. Thin Films 14 (1989) 1
2. Sproul W.D. Surf. Coat. Technol. 33 (1987) 73
3. Safi I. Surf. Coat. Technol. 127 (2000) 203
4. Schiller S., Heisig U., Beister G., Steinfelder K., Strumpfel J., Korndorfer C., and Sieber W. Thin Solid Films 118 (1981) 255
5. Baránková H., Berg S., Carlsson P., and Nender C. Thin Solid Films 260 (1995) 181
6. Martin N., and Rousselot C. J. Vac. Sci. Technol. A17 5 (1999) 2869
7. Berg S., and Nyberg T. Thin Solid Films 476 (2005) 215
8. Carter D., Sproul W.D., and Christie D. SVC Summer News Bulletin (2004) 25
9. Vaz F., Cerqueira P., Rebouta L., Nascimento S.M.C., Alves E., Goudeau P., and Rivière J.P. Surf. Coat. Technol. 174-175 (2003) 197
10. Kazemeini M.H., Berezein A.A., and Fukuhara N. Thin Solid Films 372 (2000) 70
11. Martin N., Banakh O., Santo A.M.E., Springer S., Sanjinès R., Takadoum J., and Lévy F. Appl. Surf. Sci. 185 (2001) 123
12. Martin N., Sanjinès R., Takadoum J., and Lévy F. Surf. Coat. Technol. 142-144 (2001) 615
13. Depla D., Colpaert A., Eufinger K., Segers A., Haemers J., and De Gryse R. Vacuum 66 (2002) 9
14. Sproul W.D., Rudnik P.J., Gogol C.A., and Muller R.A. Surf. Coat. Technol. 39-40 (1989) 499
15. Howson R.P., Danson N., and Safi I. Thin Solid Films 351 (1999) 32
16. Safi I., Danson N., and Howson R.P. Surf. Coat. Technol. 99 (1998) 33
17. Sproul W.D., Christie D.J., and Carter D.C. Thin Solid Films 491 (2005) 1
18. Jonsson L.B., Nyberg T., and Berg S. J. Vac.Sci. Technol. A18 2 (2000) 503
19. Rousselot C., and Martin N. Surf. Coat. Technol. 142-144 (2000) 206