Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Applied Surface Science

Volumn 254, Issue 11, 2008, Pages 3509-3516

  Lin, M C ^a   Chang, L S ^a   Lin, H C ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Gas permeation; Polyethylene terephthalate (PET); Sputtering; Titanium oxynitride

Indexed keywords

CRYSTALLINE MATERIALS; FILMS; MAGNETRON SPUTTERING; POLYETHYLENE TEREPHTHALATES; WATER VAPOR;

COLUMNAR STRUCTURE; GAS PERMEATION; REACTIVE MAGNETRON SPUTTERING; TITANIUM OXYNITRIDE;

TITANIUM COMPOUNDS;

EID: 39749103522     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.11.064     Document Type: Article

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