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Volumn 29, Issue 1, 2011, Pages 0110261-0110267

Characterization of damage induced by FIB etch and tungsten deposition in high aspect ratio vias

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAM ASSISTED DEPOSITION; ION BEAMS;

EID: 79551647895     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3539204     Document Type: Conference Paper
Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.