Dual-beam (FIB-SEM) systems techniques and automated applications

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 247-268

  Young, Richard J ^a   Moore, Mary V ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

3D metrology; Automation; Cryo; dual beam; EBSD; Failure analysis; FIB; Nanofabrication; Process control; SEM; TEM sample preparation

Indexed keywords

EID: 84892203271     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_12     Document Type: Chapter

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