Monocrystalline silicon used for integrated circuits: Still on the way

Frontiers of Materials Science in China

Volumn 2, Issue 4, 2008, Pages 335-344

  Chen, Jia He ^a   Yang, De Ren ^a   Que, Duan Lin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Crystal growth; Czochralski silicon; Defect engineered silicon; Defect engineering

Indexed keywords

EID: 57749188067     PISSN: 16737377     EISSN: 16737482     Source Type: Journal    
DOI: 10.1007/s11706-008-0062-0     Document Type: Article

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