Applications of the FIB lift-out technique for TEM specimen preparation

Microscopy Research and Technique

Volumn 41, Issue 4, 1998, Pages 285-290

  Giannuzzi, Lucille A ^a   Drown, Jennifer L ^a   Brown, Steve R ^b   Irwin, Richard B ^b   Stevie, Frederick A ^b  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b Cirent Semiconductor   (United States)

Author keywords

Ceramics; Fe Zn; Galvanized steel; Integrated circuit; Metals; Si; SiC; ZnSe

Indexed keywords

GALVANIZING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; II-VI SEMICONDUCTORS; POLYCRYSTALLINE MATERIALS; SILICON; SUBSTRATES; TIMING CIRCUITS; ZINC ALLOYS;

CERAMIC; FE-ZN; FOCUSED IONS BEAMS; GALVANIZED STEELS; LIFT OUTS; LIFT-OUT TECHNIQUES; MATERIAL SYSTEMS; SI; SITE-SPECIFIC; TEM ANALYSIS;

SILICON CARBIDE;

ARTICLE; CERAMICS; GEOMETRY; INTEGRATED CIRCUIT; PRIORITY JOURNAL; SEMICONDUCTOR; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0032523780     PISSN: 1059910X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q     Document Type: Article

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