Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1201-1204

  Kato, N I ^a   Kohno, Y ^a   Saka, H ^a,b  

^a IBM JAPAN LTD   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001318393     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581795     Document Type: Article

References (18)

1. E. C. G. Kirk, J. R. A. Cleaver, and H. Ahmed, Inst. Phys. Conf. Ser. 691, 87 (1987).
2. R. Young, E. C. G. Kirk, D. A. Williams, and H. Ahmed, Mater. Res. Soc. Symp. Proc. 205, 199 (1990).
3. D. P. Basile, R. Boylan, B. Baker, K. Hayes, and D. Soza, Mater. Res. Soc. Symp. Proc. 23, 254 (1992).
4. H. Saka, G. Nagaya, T. Sakuishi, S. Abe, and A. Muroga, Mater. Res. Soc. Symp. Proc. 45, 409 (1990).
5. A. Tanaka, Y. Sekiguchi, T. Kurita, and S. Kuroda, J. Electron Microsc. 290, 31 (1982).
6. N. I. Kato, N. Miura, and N. Tsutsui, J. Vac. Sci. Technol. A 16, 1127 (1998).
7. T. Ishitani, H. Tsuboi, T. Yaguchi, and H. Koike, J. Electron Microsc. 322, 43 (1994).
8. T. Ishitani and T. Yaguchi, Microsc. Res. Tech. 35, 320 (1996).
9. K. Gamo, Mater. Res. Soc. Symp. Proc. 577, 279 (1993).
10. S. Lipp, L. Frey, C. Lehrer, B. Frank, E. Demm, and H. Ryssel, J. Vac. Sci. Technol. B 14, 3996 (1996).
11. P. W. Nebiker, M. Dobeli, R. Muhle, and M. Suter, Nucl. Instrum. Methods Phys. Res. 897, 127 (1996).
12. A. Yamaguchi and T. Nishikawa, J. Vac. Sci. Technol. B 13, 962 (1995).
13. Y. Ochiai, K. Gamo, and S. Namba, J. Vac. Sci. Technol. B 3, 67 (1985).
14. K. V. Doorselaer, M. Van den Reeck, L. Van den Bempt, R. Young, and J. Whitney, ISTFA Proc. 405, 19 (1993).
15. J. D. Casey, Jr., A. F. Doyle, R. G. Lee, D. K. Stewart, and H. Zimmermann, Microelectron. Eng. 43, 24 (1994).
16. Y. Murakami, Oral presentation at Semicon Kansai 1996.
17. T. W. Lee, ISTFA Proc. 319, 22 (1996).
18. A. Barna, L. Toth, B. Pecz, and G. Radnoczi, Royal Microscopical Soc. Conference 1997, pp. 479-482.