SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 108, Issue 1, 2010, Pages

Resonant characteristics of ultranarrow SiCN nanomechanical resonators

(4) Guthy, Csaba a Das, Rahul M a Drobot, Brian a Evoy, Stephane a

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; FINITE ELEMENT ANALYSIS; GAS DAMPING; MATERIAL SOFTENING; NANOMECHANICAL RESONATORS; OPTICAL INTERFEROMETRY; PIEZOELECTRIC DISKS; Q-FACTORS; QUALITY FACTORS; RESONANT BEHAVIOR; RESONANT CHARACTERISTICS; RESONANT FREQUENCIES; RESONANT RESPONSE; ROOM TEMPERATURE; STRESS REDUCTION; VERTICAL DIRECTION;

FINITE ELEMENT METHOD; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

RESONATORS;

EID: 77955220500 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3428394 Document Type: Article

Times cited : (18)

References (57)

1
- 47749102990
- Microarray methods for protein biomarker detection
- DOI 10.1039/b717527b
- H. J. Lee, A. W. Wark, and R. M. Corn, Analyst (Lond.) ANALAO 0003-2654 133, 975 (2008). 10.1039/b717527b (Pubitemid 352033083)
- (2008) Analyst , vol.133 , Issue.8 , pp. 975-983
- Lee, H.J.¹ Wark, A.W.² Corn, R.M.³

2
- 0002118614
- ZZZZZZ 1465-6906. 10.1186/gb-2001-2-2-research0004
- B. B. Haab, M. J. Dunham, and P. O. Brown, Genome Biol. ZZZZZZ 1465-6906 2 0004.1 (2001). 10.1186/gb-2001-2-2-research0004
- (2001) Genome Biol. , vol.2 , pp. 00041
- Haab, B.B.¹ Dunham, M.J.² Brown, P.O.³

3
- 3843119792
- RSINAK 0034-6748, 10.1063/1.1763252
- N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, Rev. Sci. Instrum. RSINAK 0034-6748 75, 2229 (2004). 10.1063/1.1763252
- (2004) Rev. Sci. Instrum. , vol.75 , pp. 2229
- Lavrik, N.V.¹ Sepaniak, M.J.² Datskos, P.G.³

4
- 1642293269
- JAPIAU 0021-8979, 10.1063/1.1642738
- K. L. Ekinci, Y. T. Yang, and M. L. Roukes, J. Appl. Phys. JAPIAU 0021-8979 95, 2682 (2004). 10.1063/1.1642738
- (2004) J. Appl. Phys. , vol.95 , pp. 2682
- Ekinci, K.L.¹ Yang, Y.T.² Roukes, M.L.³

5
- 0037545846
- APPLAB 0003-6951, 10.1063/1.1569050
- N. V. Lavrik and P. G. Datskos, Appl. Phys. Lett. APPLAB 0003-6951 82, 2697 (2003). 10.1063/1.1569050
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2697
- Lavrik, N.V.¹ Datskos, P.G.²

6
- 7544230375
- APPLAB 0003-6951, 10.1063/1.1794378
- B. Ilic, Y. Yanh, and H. G. Craighead, Appl. Phys. Lett. APPLAB 0003-6951 85, 2604 (2004). 10.1063/1.1794378
- (2004) Appl. Phys. Lett. , vol.85 , pp. 2604
- Ilic, B.¹ Yanh, Y.² Craighead, H.G.³

7
- 51649120543
- SABCEB 0925-4005, 10.1016/j.snb.2008.06.003
- L. M. Fischer, V. A. Wright, C. Guthy, N. Yang, M. T. McDermott, J. M. Buriak, and S. Evoy, Sens. Actuators B SABCEB 0925-4005 134, 613 (2008). 10.1016/j.snb.2008.06.003
- (2008) Sens. Actuators B , vol.134 , pp. 613
- Fischer, L.M.¹ Wright, V.A.² Guthy, C.³ Yang, N.⁴ McDermott, M.T.⁵ Buriak, J.M.⁶ Evoy, S.⁷

8
- 33846876588
- Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications
- DOI 10.1038/nnano.2006.208
- M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. NNAABX 1748-3387 2, 114 (2007). 10.1038/nnano.2006.208 (Pubitemid 46226371)
- (2007) Nature Nanotechnology , vol.2 , Issue.2 , pp. 114-120
- Li, M.¹ Tang, H.X.² Roukes, M.L.³

9
- 3042783205
- APPLAB 0003-6951, 10.1063/1.1755417
- K. L. Ekinci, X. M. Huang, and M. L. Roukes, Appl. Phys. Lett. APPLAB 0003-6951 84, 4469 (2004). 10.1063/1.1755417
- (2004) Appl. Phys. Lett. , vol.84 , pp. 4469
- Ekinci, K.L.¹ Huang, X.M.² Roukes, M.L.³

10
- 1942542409
- JAPIAU 0021-8979, 10.1063/1.1650542
- B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil, J. Appl. Phys. JAPIAU 0021-8979 95, 3694 (2004). 10.1063/1.1650542
- (2004) J. Appl. Phys. , vol.95 , pp. 3694
- Ilic, B.¹ Craighead, H.G.² Krylov, S.³ Senaratne, W.⁴ Ober, C.⁵ Neuzil, P.⁶

11
- 33646398888
- NALEFD 1530-6984, 10.1021/nl052134m
- Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, Nano Lett. NALEFD 1530-6984 6, 583 (2006). 10.1021/nl052134m
- (2006) Nano Lett. , vol.6 , pp. 583
- Yang, Y.T.¹ Callegari, C.² Feng, X.L.³ Ekinci, K.L.⁴ Roukes, M.L.⁵

12
- 34547585788
- Very high frequency silicon nanowire electromechanical resonators
- DOI 10.1021/nl0706695
- X. L. Feng, R. He, P. Yang, and M. L. Roukes, Nano Lett. NALEFD 1530-6984 7, 1953 (2007). 10.1021/nl0706695 (Pubitemid 47197573)
- (2007) Nano Letters , vol.7 , Issue.7 , pp. 1953-1959
- Feng, X.L.¹ He, R.² Yang, P.³ Roukes, M.L.⁴

13
- 42149172561
- Mechanical resonance of clamped silicon nanowires measured by optical interferometry
- DOI 10.1063/1.2891002
- M. Belov, N. J. Quitoriano, S. Sharma, W. K. Hiebert, T. I. Kamins, and S. Evoy, J. Appl. Phys. JAPIAU 0021-8979 103, 074304 (2008). 10.1063/1.2891002 (Pubitemid 351538043)
- (2008) Journal of Applied Physics , vol.103 , Issue.7 , pp. 074304
- Belov, M.¹ Quitoriano, N.J.² Sharma, S.³ Hiebert, W.K.⁴ Kamins, T.I.⁵ Evoy, S.⁶

14
- 0042760419
- APPLAB 0003-6951, 10.1063/1.124554
- D. W. Carr, S. Evoy, L. Sekaric, J. M. Parpia, and H. G. Craighead, Appl. Phys. Lett. APPLAB 0003-6951 75, 920 (1999). 10.1063/1.124554
- (1999) Appl. Phys. Lett. , vol.75 , pp. 920
- Carr, D.W.¹ Evoy, S.² Sekaric, L.³ Parpia, J.M.⁴ Craighead, H.G.⁵

15
- 34047142290
- Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators
- DOI 10.1116/1.2402153
- L. M. Fischer, N. Wilding, M. Gel, and S. Evoy, J. Vac. Sci. Technol. B JVTBD9 1071-1023 25, 33 (2007). 10.1116/1.2402153 (Pubitemid 46511997)
- (2007) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.25 , Issue.1 , pp. 33-37
- Fischer, L.M.¹ Wilding, N.² Gel, M.³ Evoy, S.⁴

16
- 33745725576
- High quality factor resonance at room temperature with nanostrings under high tensile stress
- DOI 10.1063/1.2204829
- S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, J. Appl. Phys. JAPIAU 0021-8979 99, 124304 (2006). 10.1063/1.2204829 (Pubitemid 44000449)
- (2006) Journal of Applied Physics , vol.99 , Issue.12 , pp. 124304
- Verbridge, S.S.¹ Parpia, J.M.² Reichenbach, R.B.³ Bellan, L.M.⁴ Craighead, H.G.⁵

17
- 0037201865
- SAAPEB 0924-4247, 10.1016/S0924-4247(02)00149-8
- L. Sekaric, D. W. Carr, S. Evoy, J. M. Parpia, and H. G. Craighead, Sens. Actuators, A SAAPEB 0924-4247 101, 215 (2002). 10.1016/S0924-4247(02)00149-8
- (2002) Sens. Actuators, A , vol.101 , pp. 215
- Sekaric, L.¹ Carr, D.W.² Evoy, S.³ Parpia, J.M.⁴ Craighead, H.G.⁵

18
- 0037011598
- APPLAB 0003-6951, 10.1063/1.1526941
- L. Sekaric, J. M. Parpia, H. G. Craighead, T. Feygelson, B. H. Houston, and J. E. Butler, Appl. Phys. Lett. APPLAB 0003-6951 81, 4455 (2002). 10.1063/1.1526941
- (2002) Appl. Phys. Lett. , vol.81 , pp. 4455
- Sekaric, L.¹ Parpia, J.M.² Craighead, H.G.³ Feygelson, T.⁴ Houston, B.H.⁵ Butler, J.E.⁶

19
- 0001352045
- Monocrystalline silicon carbide nanoelectromechanical systems
- DOI 10.1063/1.1338959
- Y. T. Yang, K. L. Ekinci, X. M. H. Huang, L. M. Schiavone, M. L. Roukes, C. A. Zorman, and M. Mehregany, Appl. Phys. Lett. APPLAB 0003-6951 78, 162 (2001). 10.1063/1.1338959 (Pubitemid 33661791)
- (2001) Applied Physics Letters , vol.78 , Issue.2 , pp. 162-164
- Yang, Y.T.¹ Ekinci, K.L.² Huang, X.M.H.³ Schiavone, L.M.⁴ Roukes, M.L.⁵ Zorman, C.A.⁶ Mehregany, M.⁷

20
- 70350447153
- LCAHAM 1473-0197, 10.1039/b907309b
- P. S. Waggoner, M. Varshney, and H. G. Craighead, Lab Chip LCAHAM 1473-0197 9, 3095 (2009). 10.1039/b907309b
- (2009) Lab Chip , vol.9 , pp. 3095
- Waggoner, P.S.¹ Varshney, M.² Craighead, H.G.³

21
- 77955224447
- private communications
- D. W. Carr, private communications.
- Carr, D.W.¹

22
- 33947252248
- Mechanical effects of galvanic corrosion on structural polysilicon
- DOI 10.1109/JMEMS.2006.886028
- D. C. Miller, W. L. Hughes, Z. L. Wang, K. Gall, and C. R. Stoldt, J. Microelectromech. Syst. JMIYET 1057-7157 16, 87 (2007). 10.1109/JMEMS.2006. 886028 (Pubitemid 46431409)
- (2007) Journal of Microelectromechanical Systems , vol.16 , Issue.1 , pp. 87-101
- Miller, D.C.¹ Hughes, W.L.² Wang, Z.-L.³ Gall, K.⁴ Stoldt, C.R.⁵

23
- 34147173353
- Strength distributions in polycrystalline silicon MEMS
- DOI 10.1109/JMEMS.2007.892794
- B. L. Boyce, J. M. Grazier, T. E. Buchheit, and M. J. Shaw, J. Microelectromech. Syst. JMIYET 1057-7157 16, 179 (2007). 10.1109/JMEMS.2007. 892794 (Pubitemid 46564195)
- (2007) Journal of Microelectromechanical Systems , vol.16 , Issue.2 , pp. 179-190
- Boyce, B.L.¹ Grazier, J.M.² Buchheit, T.E.³ Shaw, M.J.⁴

24
- 34248394717
- Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon
- DOI 10.1063/1.2737370
- D. C. Miller, B. L. Boyce, K. Gall, and C. R. Stoldt, Appl. Phys. Lett. APPLAB 0003-6951 90, 191902 (2007). 10.1063/1.2737370 (Pubitemid 46738079)
- (2007) Applied Physics Letters , vol.90 , Issue.19 , pp. 191902
- Miller, D.C.¹ Boyce, B.L.² Gall, K.³ Stoldt, C.R.⁴

25
- 46449132956
- JAPIAU 0021-8979, 10.1063/1.2926083
- D. C. Miller, B. L. Boyce, P. G. Kotula, and C. R. Stoldt, J. Appl. Phys. JAPIAU 0021-8979 103, 123518 (2008). 10.1063/1.2926083
- (2008) J. Appl. Phys. , vol.103 , pp. 123518
- Miller, D.C.¹ Boyce, B.L.² Kotula, P.G.³ Stoldt, C.R.⁴

26
- 0037119073
- A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
- DOI 10.1016/S1359-6454(02)00158-1, PII S1359645402001581
- C. L. Muhlstein, E. A. Stach, and R. O. Ritchie, Acta Mater. ACMAFD 1359-6454 50, 3579 (2002). 10.1016/S1359-6454(02)00158-1 (Pubitemid 34813959)
- (2002) Acta Materialia , vol.50 , Issue.14 , pp. 3579-3595
- Muhlstein, C.L.¹ Stach, E.A.² Ritchie, R.O.³

27
- 0026882936
- SCIEAS 0036-8075, 10.1126/science.256.5063.1537
- J. A. Connally and S. B. Brown, Science SCIEAS 0036-8075 256, 1537 (1992). 10.1126/science.256.5063.1537
- (1992) Science , vol.256 , pp. 1537
- Connally, J.A.¹ Brown, S.B.²

28
- 13644279576
- Fatigue failure in thin-film polycrystalline silicon is due to subcritical cracking within the oxide layer
- DOI 10.1063/1.1856689, 041914
- D. H. Alsem, E. A. Stach, C. L. Muhlstein, and R. O. Ritchie, Appl. Phys. Lett. APPLAB 0003-6951 86, 041914 (2005). 10.1063/1.1856689 (Pubitemid 40232175)
- (2005) Applied Physics Letters , vol.86 , Issue.4 , pp. 0419141-0419143
- Alsem, D.H.¹ Stach, E.A.² Muhlstein, C.L.³ Ritchie, R.O.⁴

29
- 32244433374
- The critical role of environment in fatigue damage accumulation in deep-reactive ion-etched single-crystal silicon structural films
- DOI 10.1109/JMEMS.2005.863602
- O. N. Pierron and C. L. Muhlstein, J. Microelectromech. Syst. JMIYET 1057-7157 15, 111 (2006). 10.1109/JMEMS.2005.863602 (Pubitemid 43210795)
- (2006) Journal of Microelectromechanical Systems , vol.15 , Issue.1 , pp. 111-119
- Pierron, O.N.¹ Muhlstein, C.L.²

30
- 33847059674
- AENMFY 1438-1656, 10.1002/adem.200600269
- D. H. Alsem, O. N. Pierron, E. A. Stach, C. L. Muhlstein, and R. O. Ritchie, Adv. Eng. Mater. AENMFY 1438-1656 9, 15 (2007). 10.1002/adem.200600269
- (2007) Adv. Eng. Mater. , vol.9 , pp. 15
- Alsem, D.H.¹ Pierron, O.N.² Stach, E.A.³ Muhlstein, C.L.⁴ Ritchie, R.O.⁵

31
- 49649113592
- SAAPEB 0924-4247, 10.1016/j.sna.2008.05.027
- D. H. Alsem, B. L. Boyce, E. A. Stach, and R. O. Ritchie, Sens. Actuators, A SAAPEB 0924-4247 147, 553 (2008). 10.1016/j.sna.2008.05.027
- (2008) Sens. Actuators, A , vol.147 , pp. 553
- Alsem, D.H.¹ Boyce, B.L.² Stach, E.A.³ Ritchie, R.O.⁴

32
- 0345803813
- JPCBFK 1089-5647, 10.1021/jp0360164
- Y. Wang, J. A. Henry, A. T. Zehnder, and M. A. Hines, J. Phys. Chem. B JPCBFK 1089-5647 107, 14270 (2003). 10.1021/jp0360164
- (2003) J. Phys. Chem. B , vol.107 , pp. 14270
- Wang, Y.¹ Henry, J.A.² Zehnder, A.T.³ Hines, M.A.⁴

33
- 0003672941
- (Wiley-Interscience, New York)
- W. Weaver Jr., S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering (Wiley-Interscience, New York, 1990), pp. 374-376.
- (1990) Vibration Problems in Engineering , pp. 374-376
- Weaver Jr., W.¹ Timoshenko, S.P.² Young, D.H.³

34
- 0003672941
- (Wiley-Interscience, New York)
- W. Weaver Jr., S. P. Timoshenko, and D. H. Young, Vibration Problems in Engineering (Wiley-Interscience, New York, 1990), pp. 336-338.
- (1990) Vibration Problems in Engineering , pp. 336-338
- Weaver Jr., W.¹ Timoshenko, S.P.² Young, D.H.³

35
- 19944431867
- Mechanical dissipation in tetrahedral amorphous carbon
- DOI 10.1063/1.1821638, 023517
- D. A. Czaplewski, J. P. Sullivan, T. A. Friedmann, D. W. Carr, B. E. N. Keeler, and J. R. Wendt, J. Appl. Phys. JAPIAU 0021-8979 97, 023517 (2005). 10.1063/1.1821638 (Pubitemid 40183024)
- (2005) Journal of Applied Physics , vol.97 , Issue.2 , pp. 0235171-02351710
- Czaplewski, D.A.¹ Sullivan, J.P.² Friedmann, T.A.³ Carr, D.W.⁴ Keeler, B.E.N.⁵ Wendt, J.R.⁶

36
- 0000018940
- PRBMDO 0163-1829, 10.1103/PhysRevB.61.5600
- R. Lifshitz and M. L. Roukes, Phys. Rev. B PRBMDO 0163-1829 61, 5600 (2000). 10.1103/PhysRevB.61.5600
- (2000) Phys. Rev. B , vol.61 , pp. 5600
- Lifshitz, R.¹ Roukes, M.L.²

37
- 0033892144
- Quality factors in micron- and submicron-thick cantilevers
- DOI 10.1109/84.825786
- K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, J. Microelectromech. Syst. JMIYET 1057-7157 9, 117 (2000). 10.1109/84.825786 (Pubitemid 30581703)
- (2000) Journal of Microelectromechanical Systems , vol.9 , Issue.1 , pp. 117-125
- Yasumura, K.Y.¹ Stowe, T.D.² Chow, E.M.³ Pfafman, T.⁴ Kenny, T.W.⁵ Stipe, B.C.⁶ Rugar, D.⁷

38
- 4043149195
- APPLAB 0003-6951, 10.1063/1.1773928
- D. M. Photiadis and J. A. Judge, Appl. Phys. Lett. APPLAB 0003-6951 85, 482 (2004). 10.1063/1.1773928
- (2004) Appl. Phys. Lett. , vol.85 , pp. 482
- Photiadis, D.M.¹ Judge, J.A.²

39
- 33746491712
- Silicon resonant microcantilevers for absolute pressure measurement
- DOI 10.1116/1.2214698
- S. Bianco, M. Cocuzza, S. Ferrero, E. Giuri, G. Piacenza, C. F. Pirri, A. Ricci, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, and R. Correale, J. Vac. Sci. Technol. B JVTBD9 1071-1023 24, 1803 (2006). 10.1116/1.2214698 (Pubitemid 44140788)
- (2006) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.24 , Issue.4 , pp. 1803-1809
- Bianco, S.¹ Cocuzza, M.² Ferrero, S.³ Giuri, E.⁴ Piacenza, G.⁵ Pirri, C.F.⁶ Ricci, A.⁷ Scaltrito, L.⁸ Bich, D.⁹ Merialdo, A.¹⁰ Schina, P.¹¹ Correale, R.¹²

40
- 0002614116
- JVTBD9 1071-1023, 10.1116/1.586300
- F. Blom, S. Bouwstra, M. Elwenspoek, and J. Fluitman, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10, 19 (1992). 10.1116/1.586300
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 19
- Blom, F.¹ Bouwstra, S.² Elwenspoek, M.³ Fluitman, J.⁴

41
- 11744365184
- JVTBD9 1071-1023, 10.1116/1.590416
- D. W. Carr, L. Sekaric, and H. G. Craighead, J. Vac. Sci. Technol. B JVTBD9 1071-1023 16, 3821 (1998). 10.1116/1.590416
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3821
- Carr, D.W.¹ Sekaric, L.² Craighead, H.G.³

42
- 33846433756
- PRBMDO 0163-1829, 10.1103/PhysRevB.75.041305
- B. Lee and R. Rudd, Phys. Rev. B PRBMDO 0163-1829 75, 041305 (2007). 10.1103/PhysRevB.75.041305
- (2007) Phys. Rev. B , vol.75 , pp. 041305
- Lee, B.¹ Rudd, R.²

43
- 33846371577
- PRBMDO 0163-1829, 10.1103/PhysRevB.74.235441
- Z. Tang and N. R. Aluru, Phys. Rev. B PRBMDO 0163-1829 74, 235441 (2006). 10.1103/PhysRevB.74.235441
- (2006) Phys. Rev. B , vol.74 , pp. 235441
- Tang, Z.¹ Aluru, N.R.²

44
- 33749436721
- Silicon carbide nanowires under external loads: An atomistic simulation study
- DOI 10.1103/PhysRevB.74.165303
- M. A. Makeev, D. Srivastava, and M. Menon, Phys. Rev. B PRBMDO 0163-1829 74, 165303 (2006). 10.1103/PhysRevB.74.165303 (Pubitemid 44511795)
- (2006) Physical Review B - Condensed Matter and Materials Physics , vol.74 , Issue.16 , pp. 165303
- Makeev, M.A.¹ Srivastava, D.² Menon, M.³

45
- 27944483641
- Orientation and size dependence of the elastic properties of zinc oxide nanobelts
- DOI 10.1088/0957-4484/16/12/001, PII S0957448405036457
- A. J. Kulkarni, M. Zhou, and F. J. Ke, Nanotechnology NNOTER 0957-4484 16, 2749 (2005). 10.1088/0957-4484/16/12/001 (Pubitemid 41677022)
- (2005) Nanotechnology , vol.16 , Issue.12 , pp. 2749-2756
- Kulkarni, A.J.¹ Zhou, M.² Ke, F.J.³

46
- 28244474448
- Size-dependent elasticity of nanowires: Nonlinear effects
- DOI 10.1103/PhysRevB.71.241403, 241403
- H. Liang, M. Upmanyu, and H. Huang, Phys. Rev. B PRBMDO 0163-1829 71, 241403 (2005). 10.1103/PhysRevB.71.241403 (Pubitemid 41702928)
- (2005) Physical Review B - Condensed Matter and Materials Physics , vol.71 , Issue.24 , pp. 1-4
- Liang, H.¹ Upmanyu, M.² Huang, H.³

47
- 4143098332
- JMPSA8 0022-5096, 10.1016/j.jmps.2004.03.009
- J. Diao, K. Gall, and M. L. Dunn, J. Mech. Phys. Solids JMPSA8 0022-5096 52, 1935 (2004). 10.1016/j.jmps.2004.03.009
- (2004) J. Mech. Phys. Solids , vol.52 , pp. 1935
- Diao, J.¹ Gall, K.² Dunn, M.L.³

48
- 33644899451
- Diameter-dependent electromechanical properties of GaN nanowires
- DOI 10.1021/nl051860m
- C. Y. Nam, P. Jaroenapibal, D. Tham, D. E. Luzzi, S. Evoy, and J. E. Fischer, Nano Lett. NALEFD 1530-6984 6, 153 (2006). 10.1021/nl051860m (Pubitemid 43382943)
- (2006) Nano Letters , vol.6 , Issue.2 , pp. 153-158
- Nam, C.-Y.¹ Jaroenapibal, P.² Tham, D.³ Luzzi, D.E.⁴ Evoy, S.⁵ Fischer, J.E.⁶

49
- 0242317277
- APPLAB 0003-6951, 10.1063/1.1618369
- X. Li, T. Ono, Y. Wang, and M. Esashi, Appl. Phys. Lett. APPLAB 0003-6951 83, 3081 (2003). 10.1063/1.1618369
- (2003) Appl. Phys. Lett. , vol.83 , pp. 3081
- Li, X.¹ Ono, T.² Wang, Y.³ Esashi, M.⁴

50
- 33344464265
- Size dependence of Young's modulus in ZnO nanowires
- DOI 10.1103/PhysRevLett.96.075505, 075505
- C. Q. Chen, Y. Shi, Y. S. Zhang, J. Zhu, and Y. J. Yan, Phys. Rev. Lett. PRLTAO 0031-9007 96, 075505 (2006). 10.1103/PhysRevLett.96.075505 (Pubitemid 43291095)
- (2006) Physical Review Letters , vol.96 , Issue.7 , pp. 1-4
- Chen, C.Q.¹ Shi, Y.² Zhang, Y.S.³ Zhu, J.⁴ Yan, Y.J.⁵

51
- 55049116344
- PRLTAO 0031-9007, 10.1103/PhysRevLett.101.175502
- B. Wen, J. E. Sader, and J. J. Boland, Phys. Rev. Lett. PRLTAO 0031-9007 101, 175502 (2008). 10.1103/PhysRevLett.101.175502
- (2008) Phys. Rev. Lett. , vol.101 , pp. 175502
- Wen, B.¹ Sader, J.E.² Boland, J.J.³

52
- 34447616984
- Characterizations of elastic behaviors of silicon nitride thin films with varying thicknesses
- DOI 10.1016/j.msea.2007.02.096, PII S0921509307003966
- Y. Ren and D. C. C. Lam, Mater. Sci. Eng., A MSAPE3 0921-5093 467, 93 (2007). 10.1016/j.msea.2007.02.096 (Pubitemid 47087287)
- (2007) Materials Science and Engineering A , vol.467 , Issue.1-2 , pp. 93-96
- Ren, Y.¹ Lam, D.C.C.²

53
- 0036571254
- A comparative study of plasma enhanced chemically vapor deposited Si-O-H and Si-N-C-H films using the environmentally benign precursor diethylsilane
- DOI 10.1016/S0167-577X(01)00545-6, PII S0167577X01005456
- R. A. Levy, L. Chen, J. M. Grow, and Y. Yu, Mater. Lett. MLETDJ 0167-577X 54, 102 (2002). 10.1016/S0167-577X(01)00545-6 (Pubitemid 34506157)
- (2002) Materials Letters , vol.54 , Issue.2-3 , pp. 102-107
- Levy, R.A.¹ Chen, L.² Grow, J.M.³ Yu, Y.⁴

54
- 0142012118
- JAPNDE 0021-4922, 10.1143/JJAP.42.5246
- C. C. Chiang, M. C. Chen, C. C. Ko, S. M. Jang, C. H. Yu, and M. S. Liang, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 42, 5246 (2003). 10.1143/JJAP.42.5246
- (2003) Jpn. J. Appl. Phys., Part 1 , vol.42 , pp. 5246
- Chiang, C.C.¹ Chen, M.C.² Ko, C.C.³ Jang, S.M.⁴ Yu, C.H.⁵ Liang, M.S.⁶

55
- 0035497592
- JACTAW 0002-7820
- A. Bauer, M. Christ, A. Zimmermann, and F. Aldinger, J. Am. Ceram. Soc. JACTAW 0002-7820 84, 2203 (2001).
- (2001) J. Am. Ceram. Soc. , vol.84 , pp. 2203
- Bauer, A.¹ Christ, M.² Zimmermann, A.³ Aldinger, F.⁴

56
- 7444223603
- JMIYET 1057-7157, 10.1109/JMEMS.2004.836815
- W. H. Chuang, T. Luger, R. K. Fettig, and R. Ghodssi, J. Microelectromech. Syst. JMIYET 1057-7157 13, 870 (2004). 10.1109/JMEMS.2004. 836815
- (2004) J. Microelectromech. Syst. , vol.13 , pp. 870
- Chuang, W.H.¹ Luger, T.² Fettig, R.K.³ Ghodssi, R.⁴

57
- 0003884869
- (CRC, Boca Raton, Florida)
- J. F. Shackelford, W. Alexander, and J. S. Park, The CRC Materials Science and Engineering Handbook (CRC, Boca Raton, Florida, 1992).
- (1992) The CRC Materials Science and Engineering Handbook
- Shackelford, J.F.¹ Alexander, W.² Park, J.S.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.