Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon

Journal of Applied Physics

Volumn 103, Issue 12, 2008, Pages

  Miller, David C ^a,b   Boyce, Brad L ^c   Kotula, Paul G ^c   Stoldt, Conrad R ^a,b  

^a University of Colorado at Boulder   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CHEMISTRY; CORROSION; CRYSTAL CHEMISTRY; ETCHING; FAILURE ANALYSIS; FRACTURE FIXATION; GALVANIZING; GOLD; LITHOGRAPHY; MORPHOLOGY; OPTICAL DESIGN; POWDERS; QUALITY ASSURANCE; RELIABILITY; SAFETY FACTOR; SILICON; SINGLE CRYSTAL SURFACES; SULFATE MINERALS; SURFACES; TENSILE STRENGTH; WETTING;

(1 1 0) SURFACE; (100) SILICON; (I ,J) CONDITIONS; ACID SOLUTIONS; AMERICAN INSTITUTE OF PHYSICS (AIP); CAVITY FORMATION; CHARACTERIZATION TECHNIQUES; CONNECTIONS (STRUCTURAL); CORRODED SURFACES; CORROSION DAMAGES; CRYSTAL SI (C SI); DAMAGE EVOLUTION; DAMAGE MORPHOLOGY; EF FECTIVE MODULUS; ELECTRICAL CONTACTS; ETCH CHEMISTRY; ETCHING CONDITIONS; EVOLUTION (CO); FABRICATION TECHNOLOGIES (CO); GALVANIC CELLS; GALVANIC CORROSIONS; GRAIN-BOUNDARY (GB); INTER-GRANULAR (IG) FRACTURE; MATERIAL REMOVALS; MECHANICAL PERFORMANCES; METALLIC LAYERS; MICROMACHINED; MONOCRYSTALLINE SILICON; POLY CRYSTALLINE; POROUS SILICON FORMATION; SCANNING PROBES; SINGLE CRYSTAL SILICON (SCS); STRENGTH (IGC: D5/D6); STRUCTURAL LAYERS; SURFA CE WETTING; TENSILE SPECIMENS;

POROUS SILICON;

EID: 46449132956     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2926083     Document Type: Article

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