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Volumn 90, Issue 19, 2007, Pages

Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION; ELASTIC MODULI; GRAIN BOUNDARIES; HYDROFLUORIC ACID; MICROMACHINING; TENSILE PROPERTIES;

MATERIAL REMOVAL; MECHANICAL STRUCTURES; METALLIC LAYER; UNCORRODED SILICON;

POLYSILICON;

EID: 34248394717 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2737370 Document Type: Article

Times cited : (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.