Virus detection using nanoelectromechanical devices

Applied Physics Letters

Volumn 85, Issue 13, 2004, Pages 2604-2606

  Ilic, B ^a   Yang, Y ^a   Craighead, H G ^a  

^a Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIBODY IMMOBILIZATION LAYER; BACULOVIRUSES; FREQUENCY SHIFT; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD);

ADSORPTION; ANTIBODIES; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; ELECTRON BEAM LITHOGRAPHY; MICROMACHINING; MONOLAYERS; NATURAL FREQUENCIES; POLYSILICON; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SOLUTIONS; VIRUSES;

ELECTROMECHANICAL DEVICES;

EID: 7544230375     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1794378     Document Type: Article

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