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Volumn 85, Issue 13, 2004, Pages 2604-2606
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Virus detection using nanoelectromechanical devices
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIBODY IMMOBILIZATION LAYER;
BACULOVIRUSES;
FREQUENCY SHIFT;
LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD);
ADSORPTION;
ANTIBODIES;
ATOMIC FORCE MICROSCOPY;
CANTILEVER BEAMS;
CHEMICAL VAPOR DEPOSITION;
COATING TECHNIQUES;
ELECTRON BEAM LITHOGRAPHY;
MICROMACHINING;
MONOLAYERS;
NATURAL FREQUENCIES;
POLYSILICON;
REACTIVE ION ETCHING;
SCANNING ELECTRON MICROSCOPY;
SENSITIVITY ANALYSIS;
SOLUTIONS;
VIRUSES;
ELECTROMECHANICAL DEVICES;
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EID: 7544230375
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1794378 Document Type: Article |
Times cited : (352)
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References (16)
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